U.S.-Korea Cooperative Science: Morphology of Ion Bombarded Surfaces

美韩合作科学：离子轰击表面的形态学

• 批准号: 9910426
• 负责人: Albert-Laszlo Barabasi
• 金额: $ 1.46万
• 依托单位: University of Notre Dame
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-07-01 至 2003-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9910426&HistoricalAwards=false
• 关键词: U.S.; Korea; Cooperative; Science; Morphology

9910426BarabasiThis award supports a 3-year collaborative research between Dr. Albert-Laszlo Barabasi, University of Notre Dame, Indiana and Professor Byungnam Kahng at Konkuk University, Seoul, Korea. The proposed collaboration aims to obtain a coherent understanding of the main physical factors contributing to the morphology of surface eroded by ion bombardment, as well as to investigate the effect of the surface morphology on the sputtering yield. Ion-beam sputtering, the removal of material from the surface of solids through the impact of energetic particles, is a particularly important thin film processing technique. Due to its relevance to a number of experimental techniques, measuring tools and patterning methods, the morphological features of surfaces erodes by ion bombardment is a much investigated problem. Beyond the technological driving forces, such studies are timely due to the increasing availability of high resolution observation techniques that offer detailed information about the surface morphology.The PIs plan to develop integration and discrete models to investigate the following problems:(1) The dynamics of yield evolution during the sputtering process, a phenomenon that can be directly compared to various experimental results.(2) The low temperature morphology of sputter eroded surfaces when thermally induced surface is small, and surface relaxation is dominated by ion-induced effective diffusion.(3) To use dynamic renormalization group methods to investigate the effect of the anisotropy on the surface morphology.This project will be performed in conjunction with Professor Kahng's group at Konkuk University, Seoul, Korea under the U.S.-Korea Cooperative Science Program. This project is relevant to the objectives of the U.S.-Korea Cooperative Science Program, which seeks to increase the level of cooperation between U.S. and Korean scientists and engineers through the exchange of scientific information, ideas, skills, and techniques and through collaboration on problems of mutual benefit. The Korea Science and Engineering Foundation support Korean participation.

该奖项支持印第安纳州圣母大学Albert-Laszlo Barabasi博士和韩国首尔建国大学Byungnam kahni教授为期3年的合作研究。本次合作旨在获得对离子轰击侵蚀表面形貌的主要物理因素的一致理解，并研究表面形貌对溅射成品率的影响。离子束溅射，通过高能粒子的冲击从固体表面去除材料，是一种特别重要的薄膜加工技术。由于其与许多实验技术、测量工具和图案化方法的相关性，离子轰击表面侵蚀的形态特征是一个被广泛研究的问题。除了技术驱动力之外，此类研究是及时的，因为高分辨率观测技术的可用性越来越高，可以提供有关表面形态的详细信息。pi计划开发集成和离散模型来研究以下问题：(1)溅射过程中良率演变的动力学，这一现象可以直接与各种实验结果进行比较。(2)热诱导表面较小时溅射侵蚀表面的低温形貌，表面弛豫以离子诱导的有效扩散为主。(3)采用动态重整化群方法研究各向异性对表面形貌的影响。该项目将在韩美合作科学项目下与建国大学姜教授小组共同进行。该项目与美韩合作科学项目（U.S.- korea Cooperative Science Program）的目标相关，该项目旨在通过科学信息、思想、技能和技术的交流以及在互利问题上的合作，提高美韩科学家和工程师之间的合作水平。韩国科学财团支持韩国人参与。