SBIR Phase I: Low-Cost Formation of Ultrahard Diamond-Like Coatings

SBIR 第一阶段：低成本形成超硬类金刚石涂层

• 批准号: 9960578
• 负责人: Arthur Fortini
• 金额: $ 9.94万
• 依托单位: ULTRAMET, INC.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-01-01 至 2000-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9960578&HistoricalAwards=false
• 关键词: SBIR; Phase; Low; Cost; Formation

Ultrahard materials (UHM) possess many superior properties, making them highly desirable as industrial materials. Unfortunately, these materials, particularly the hardest of all, diamond-like materials, cannot be used in many high-volume applications due to their low oxidation resistance, low thermal stability, and high cost. For this reason, new, low-cost UHMs with comparable or even superior properties are required. Calculations based on known thermodynamic and structural data predict that cubic carbon nitride, alpha-C3N4, will be significantly harder and much more thermally oxidation-resistant than diamond. Despite significant progress made by researchers over the last decade, the formation of pure phases of this material, as well as others like it, has not as yet been accomplished. In the project, Ultramet will generate novel UHMs such as alpha-C3N4, cubic carbonazenide (cubic C(HN)), and composite ternary nitrides consisting of metal nitride nanocrystals and an amorphous silicon nitride (Si3N4) phase using a novel chemical vapor deposition (CVD)-based process. This new process, which is kinetically driven, allows the formation of a large variety of ceramic materials at or near room temperature.Applications: The proposed novel CVD processes will yield new UHMs such as alpha-C3N4, cubic C(HN), and composite ternary nitride/Si3N4 phases with hardness and oxidation stability equal to or exceeding those of cubic boron nitride and diamond. The new processes will allow these new UHMs to be produced at lower cost and used in a much wider range of applications than current UHMs.Keywords: ultrahard materials, cubic carbon nitride, cubic carbonazenide, ternary metal nitrides, chemical vapor deposition, thin films, superabrasives

超硬材料(UHM)具有许多优异的性能，使其成为非常受欢迎的工业材料。不幸的是，这些材料，尤其是最硬的类金刚石材料，由于其低抗氧化性、低热稳定性和高成本，不能用于许多大批量应用。为此，需要具有类似甚至更好性能的新的、低成本的UHM。根据已知的热力学和结构数据进行的计算预测，立方氮化碳，α-C3N4，将比钻石更坚硬，抗热氧化能力更强。尽管研究人员在过去十年中取得了重大进展，但这种材料以及其他类似材料的纯相的形成尚未完成。在该项目中，UltraMet将使用一种基于化学气相沉积(CVD)的新工艺来生产新型的UHM，如α-C3N4、立方碳氮化物(立方碳(HN))，以及由金属氮化物纳米晶和非晶氮化硅(Si3N4)相组成的复合三元氮化物。应用：建议的新CVD工艺将产生新的UHM，如α-C3N4、立方C(HN)和复合三元氮化物/Si3N4相，其硬度和氧化稳定性等于或超过立方氮化硼和钻石。新工艺将使这些新的UHM能够以更低的成本生产，并比目前的UHM应用范围更广。关键词：超硬材料、立方氮化碳、立方碳氮化物、三元金属氮化物、化学气相沉积、薄膜、超磨料