GOALI: Electric Field Microscopy of Computer Chips using a Scanning Single Electron Transistor

GOALI：使用扫描单电子晶体管对计算机芯片进行电场显微镜检查

• 批准号: 9973268
• 负责人: Frederick Wellstood
• 金额: $ 29.18万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-06-15 至 2002-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9973268&HistoricalAwards=false
• 关键词: GOALI; Electric; Field; Microscopy; Computer

9973268WellstoodThis GOALI project involves the design, assembly and evaluation of an extremely sensitive scanning electric field microscope. To achieve a high sensitivity to electric field, the microscope will use a nano-electronic device, the Single Electron Transistor (SET), as its sensor. In operation, the SET sensor will be cooled to the 4.2 to 10 K range while the samples will be in air at room temperature. The hot and cold parts of the system will be thermally isolated from each other by vacuum and a thin transparent window. After it is constructed, the microscope will be used to image the fields produced by voltages on wires in multi-chip modules and computer chips that will be provided by our industrial collaborators (Neocera, Inc). We will evaluate the performance of the system and its potential for application to failure analysis detection of open circuit faults in semiconductor circuits. For real chips mounted on standard carriers, our overall goal for the project will be to achieve a spatial resolution in the 50 um range while looking from a distance of 300 um, more than sufficient for present needs for diagnosing opens in multi-chip modules.%%% This GOALI proposal involves a close collaboration between the University of Maryland and a small high-tech company (Neocera, Inc.) and with other potential industrial customers. While students are developing the electric field microscope, they will not only undertake state-of-the-art research on nano-electronics but will also get exposed to modern manufacturing techniques in the computer industry. To keep the project on track, the students will work closely with the companies involved and will meet regularly with industrial physicists and engineers in an industrial environment. During the project, the students will also have the opportunity to meet entrepreneurs, company presidents, and potential customers, from very large to very small companies. In addition to providing students with a technical mastery of key technology and science, the project will also offer a breadth of experience that will prepare them for industrial research positions or an entrepreneurial role.***

9973268Wellstood这个GOALI项目涉及一个极其灵敏的扫描电场显微镜的设计、组装和评估。 为了实现对电场的高灵敏度，显微镜将使用纳米电子器件，单电子晶体管（SET）作为其传感器。 在操作中，SET传感器将被冷却至4.2至10 K范围，而样品将在室温下的空气中。 系统的冷热部分将通过真空和薄的透明窗口彼此热隔离。 建成后，显微镜将用于成像多芯片模块和计算机芯片中的电线电压产生的场，这些芯片将由我们的工业合作者（Neocera，Inc）提供。 我们将评估该系统的性能和它的潜在应用于半导体电路开路故障的故障分析检测。 对于安装在标准载体上的真实的芯片，我们项目的总体目标是实现50 um范围内的空间分辨率，同时从300 um的距离观察，足以满足目前诊断多芯片模块中开路的需求。这个GOALI提案涉及马里兰州大学和一家小型高科技公司（Neocera，Inc.）以及其他潜在的工业客户。 当学生们开发电场显微镜时，他们不仅将进行最先进的纳米电子学研究，还将接触计算机行业的现代制造技术。为了保持项目的正常进行，学生将与相关公司密切合作，并定期与工业环境中的工业物理学家和工程师会面。在项目期间，学生还将有机会会见企业家，公司总裁和潜在客户，从非常大的公司到非常小的公司。 除了为学生提供关键技术和科学的技术掌握，该项目还将提供广泛的经验，使他们为工业研究职位或创业角色做好准备。