GOALI: Electric Field Microscopy of Computer Chips using a Scanning Single Electron Transistor

9973268 wellstand这个GOALI项目涉及设计、组装和评估一台极其灵敏的扫描电场显微镜。为了实现对电场的高灵敏度，显微镜将使用纳米电子器件，单电子晶体管（SET）作为传感器。在工作中，SET传感器将被冷却到4.2至10 K范围，而样品将在室温下的空气中。系统的冷热部分将通过真空和薄透明窗口相互热隔离。构建完成后，显微镜将用于成像多芯片模块和计算机芯片中电线电压产生的场，这些模块和计算机芯片将由我们的工业合作伙伴（Neocera, Inc）提供。我们将评估该系统的性能及其在半导体电路开路故障分析检测中的应用潜力。对于安装在标准载波上的真正芯片，我们项目的总体目标是在距离为300 um的情况下实现50 um范围内的空间分辨率，这足以满足目前多芯片模块中诊断开放的需求。该GOALI提案涉及马里兰大学与一家小型高科技公司（Neocera, Inc.）以及其他潜在工业客户之间的密切合作。当学生在开发电场显微镜时，他们不仅要从事纳米电子学的最新研究，还将接触到计算机行业的现代制造技术。为了使项目顺利进行，学生们将与相关公司密切合作，并在工业环境中定期与工业物理学家和工程师会面。在项目期间，学生们也将有机会见到企业家、公司总裁和潜在客户，从非常大的公司到非常小的公司。除了为学生提供对关键技术和科学的技术掌握之外，该项目还将为他们提供广泛的经验，为他们从事工业研究职位或企业家角色做好准备

9973268WellstoodThis GOALI project involves the design, assembly and evaluation of an extremely sensitive scanning electric field microscope. To achieve a high sensitivity to electric field, the microscope will use a nano-electronic device, the Single Electron Transistor (SET), as its sensor. In operation, the SET sensor will be cooled to the 4.2 to 10 K range while the samples will be in air at room temperature. The hot and cold parts of the system will be thermally isolated from each other by vacuum and a thin transparent window. After it is constructed, the microscope will be used to image the fields produced by voltages on wires in multi-chip modules and computer chips that will be provided by our industrial collaborators (Neocera, Inc). We will evaluate the performance of the system and its potential for application to failure analysis detection of open circuit faults in semiconductor circuits. For real chips mounted on standard carriers, our overall goal for the project will be to achieve a spatial resolution in the 50 um range while looking from a distance of 300 um, more than sufficient for present needs for diagnosing opens in multi-chip modules.%%% This GOALI proposal involves a close collaboration between the University of Maryland and a small high-tech company (Neocera, Inc.) and with other potential industrial customers. While students are developing the electric field microscope, they will not only undertake state-of-the-art research on nano-electronics but will also get exposed to modern manufacturing techniques in the computer industry. To keep the project on track, the students will work closely with the companies involved and will meet regularly with industrial physicists and engineers in an industrial environment. During the project, the students will also have the opportunity to meet entrepreneurs, company presidents, and potential customers, from very large to very small companies. In addition to providing students with a technical mastery of key technology and science, the project will also offer a breadth of experience that will prepare them for industrial research positions or an entrepreneurial role.***