MRI: Acquisition of Instrumentation for Dual Ion-Beam Deposition and Analysis of Carbon Nitride Thin Films

该主要研究仪器（MRI）奖为购买设备提供资金，用于合成和表征四面体结构的广域氮化碳薄膜。主要设备包括：(1)双离子源沉积系统及其附件，包括真空室、真空发生器和电源控制单元；(2)x射线衍射仪；(3)显微硬度计；(4)四点电阻率和电导率探头。一个高性能的计算机工作站也需要初步开发所需的互补理论模型，以优化系统。双离子源系统将在内部组装，而其他设备将直接从供应商处购买。该仪器将在几个方面对东北大学的研究和教育目标产生重大影响：(1)使用该仪器进行的研究将建立在研究人员在薄膜生长和材料等离子体处理方面的现有活动的基础上，并且其他教师也表示有兴趣使用该设备进行研究。(2)仪器允许机械工程和电气工程两个不同学科的教员之间的合作，并将促进跨学科和多学科的项目和问题解决。这是大学学术共同经验（ACE）计划的一个主要目标，该计划鼓励教师和学生认识到各种学术项目之间的相互联系，并将这种理解应用于解决复杂问题。(3)购置该设备将促进我校合作办学项目的发展。具体来说，将允许与当地企业合作开发项目，以合作教育本科生。出于同样的原因，该设备将通过提供机会来设计简单的科学项目，向代表性不足的高中学生展示，从而增强研究人员的外展计划。该设备所取得的研究进展也将被纳入大学材料加工和等离子体加工课程。

This Major Research Instrumentation (MRI) award provides funds for acquisition of equipment to synthesize and characterize wide-area carbon nitride thin films of tetrahedral structure. The major equipment is comprised of: (1) a dual ion-source deposition system with accessories including a vacuum chamber, vacuum generator and a power control unit, (2) a x-ray diffractometer, (3) a micro-hardness tester; and (4) a four-point resistivity and conductivity probe. A high-performance computer workstation is also required for preliminary development of the complementary theoretical model needed to optimize the system. The dual ion-source system will be assembled in-house while the other pieces of equipment will be purchased directly from vendors. This instrumentation will have major impact on the research and educational goals of the Northeastern University in several ways: (1) The research to be conducted with the instrumentation will build upon the existing activities of the investigators on thin film growth and plasma processing of materials and additional faculty have also expressed interest in using the equipment for their research. (2) The instrumentation allows for collaboration between two faculty in different disciplines, Mechanical Engineering and Electrical Engineering, and will promote interdisciplinary and multi-disciplinary projects and problem solution. This is a major goal of the Academic Common Experience (ACE) initiative of the University, which is to encourage faculty and students to appreciate the interconnectedness of various academic programs and to apply this understanding to solving complex problems. (3) Acquiring this equipment will advance the Cooperative Education Program of the University. Specifically, it will allow projects to be developed in collaboration with local companies for the cooperative education of undergraduate students. By the same token, this equipment will enhance the outreach programs of the investigators by providing the opportunity to design simple scientific projects for demonstration to underrepresented high school students. The research advances made with the equipment will also be incorporated into the materials processing and plasma processing curriculum in the University.