XYZ on a Chip: Magnetic Nanosensors on a Chip

芯片上的 XYZ：芯片上的磁性纳米传感器

• 批准号: 9980734
• 负责人: Andrew Cleland
• 金额: $ 46万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-10-01 至 2002-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9980734&HistoricalAwards=false
• 关键词: XYZ; Chip; Magnetic; Nanosensors

9980734ClelandThe PI's have recently developed methods by which deep sub-micron-size mechanical structures, with integrated displacement-inducing and displacement-sensing elements, can be fabricated and used as practical sensors. The PI's wish to apply this technology to the development of high-frequency chip-based magnetic sensors, which in the ultimate limit will be sensitive to the behavior of individual magnetic moments. The sensors they will develop will be based on nanometer-scale, radiofrequency cantilevers, fabricated from single-crystal GaAs heterostructure substrates. GaAs is a piezoelectric material, allowing the use of both piezoresistive and piezoelectric strain sensing. The magnetic signals will emanate either from magnetic samples embedded in the sensor geometry, or from the interaction of an magnetic tip integrated in the cantilever design, which is scanned over a fixed, magnetically active sample. In the former geometry, they plan experiments to probe the physics of very small ferromagnetic and paramagnetic samples, and the mechanical detection of optically-induced electronic and nuclear magnetization. The latter geometry will allow a number of microscopy applications, probing both surface and subsurface interactions. Signals emanating from subsurface sources, such as electric currents on a buried heterostructure interface, would allow imaging on an otherwise topologically featureless sample.These sensors should be able to probe time scales approximately four orders of magnitude shorter, and magnetic volume scales approximately five orders of magnitude smaller, than the present state-of-the-art in scanned magnetic force probes and fixed torque magnetometry. These sensors should allow sensitivities of order one Bohr magneton at frequencies approaching 1 GHz. The high frequencies and small physical size scales they will thereby be able to probe will engender a number of interesting engineering and science applications.***

9980734Cleland Pi最近开发了使用该方法，通过这种方法，具有深层的亚微米大小的机械结构，具有集成的位移诱导和位移 - 感应元件可以被制造并用作实用传感器。 PI希望将该技术应用于高频基于芯片的磁性传感器的开发，在最终的极限下，该传感器将对单个磁矩的行为敏感。 他们将开发的传感器将基于由单晶GAAS异质结构底物制成的纳米尺度，射频悬臂。 GAAS是一种压电材料，允许使用压电和压电应变感应。 磁信号将来自嵌入传感器几何形状中的磁样品，或者是从悬臂设计中积分的磁尖端的相互作用中散发出来的，该磁尖在悬臂设计中，该磁尖在固定的磁性活性样品中扫描。 在以前的几何形状中，他们计划实验，以探测非常小的铁磁和顺磁样品的物理，以及光学诱导的电子和核磁化的机械检测。 后一个几何形状将允许许多显微镜应用，从而探测表面和地下相互作用。 从地下源发出的信号，例如埋藏的异质结构界面上的电流，将允许在原本拓扑上的无特征样品中进行成像。这些传感器应能够探测这些时间尺度的尺度大约短四个数量级，而磁性音量量则比当前的固定式尺度尺度尺度尺度大约要小，而在扫描的固定磁场中，均匀量表和固定的固定量。 这些传感器应允许在接近1 GHz的频率下对一个Bohr Magneton的顺序敏感。 他们将能够进行探测的高频和较小的物理尺寸将产生许多有趣的工程和科学应用。***