Mechanics of PZT/Silicon Interfaces for MEMS Reliability

用于确保 MEMS 可靠性的 PZT/硅接口力学

• 批准号: 0000197
• 负责人: Assimina Pelegri
• 金额: $ 16.46万
• 依托单位: Rutgers University New Brunswick
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-07-01 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0000197&HistoricalAwards=false
• 关键词: Mechanics; PZT; Silicon; Interfaces; MEMS

0000197PelegriIn this study, effects of anisotropy and microscale on materials properties will be incorporated in a model to predict the interfacial reliability of MEMS devices. The goals of the proposed study are to: a) develop innovative testing methodologies to measure interfacial fracture toughness at the meso and microscale levels, b) experimentally demonstrate the loss mechanisms and mode mixity effects on the structural integrity of PZT/Silicon interfaces, and c) formulate a law for the energy release rate and the fracture toughness that account for the materials anisotropy at the PZT/Silicon interface. In addition, viscous loss mechanisms for the PZT material and the nature of structural losses for the silicon will be investigated. In the educational plan the PI proposes to increase and modernize student involvement in the ongoing research, within and outside the Mechanical and Aerospace Engineering Department, by promoting research transfer into classrooms, and simultaneously increasing the number of women represented in engineering. To increase the gender diversity, the PI will collaborate with Douglass College of Women. Among other activities, a seminar series, with distinguished women in the field, will be held in order to attract more women and minorities in engineering. The PI proposes to develop a new course in which she will promote state-of-the-art experimental techniques, modern principles and methods of analysis used in the study of MEMS. The syllabus of the course will be closely related to the proposed program in order to create a direct link between research and teaching.***

在这项研究中，各向异性和微尺度对材料性能的影响将被纳入到一个模型中，以预测MEMS器件的界面可靠性。这项研究的目标是：a)开发新的测试方法来测量细观和微观水平的界面断裂韧性；b)通过实验验证PZT/Si界面的损耗机制和模式混合效应；c)建立PZT/Si界面材料各向异性的能量释放率和断裂韧性的规律。此外，还将研究PZT材料的粘性损耗机理和硅的结构损耗的性质。在教育计划中，国际和平研究所建议通过促进研究转移到课堂，同时增加工程学中的女性人数，增加学生在机械和航空航天工程系内外正在进行的研究中的参与，并使其现代化。为了增加性别多样性，国际妇女联合会将与道格拉斯女子学院合作。除其他活动外，还将举办一系列研讨会，邀请该领域的杰出妇女参加，以吸引更多从事工程工作的妇女和少数群体。PI建议开发一门新课程，在该课程中，她将推广在MEMS研究中使用的最先进的实验技术、现代原理和分析方法。本课程的教学大纲将与拟议的计划密切相关，以便在研究和教学之间建立直接联系。*