Mechanics of PZT/Silicon Interfaces for MEMS Reliability

0000197 Pelegri在这项研究中，各向异性和微尺度对材料性能的影响将被纳入一个模型，以预测MEMS器件的界面可靠性。拟议的研究的目标是：a）开发创新的测试方法来测量界面断裂韧性在介观和微观尺度的水平，B）实验证明的损耗机制和模式混合的影响PZT/硅界面的结构完整性，和c）制定一个法律的能量释放率和断裂韧性，占材料各向异性的PZT/硅界面。 此外，将研究PZT材料的粘性损耗机制和硅的结构损耗的性质。 在教育计划中，PI建议通过促进研究转移到课堂，同时增加工程领域的妇女人数，增加学生对机械和航空航天工程系内外正在进行的研究的参与并使其现代化。 为了增加性别多样性，PI将与道格拉斯女子学院合作。 除其他活动外，还将举办一系列研讨会，邀请该领域的杰出妇女参加，以吸引更多的妇女和少数民族参加工程学。PI建议开发一个新的课程，她将在其中推广最先进的实验技术，现代原理和MEMS研究中使用的分析方法。 该课程的教学大纲将与拟议的计划密切相关，以便在研究和教学之间建立直接联系。

0000197PelegriIn this study, effects of anisotropy and microscale on materials properties will be incorporated in a model to predict the interfacial reliability of MEMS devices. The goals of the proposed study are to: a) develop innovative testing methodologies to measure interfacial fracture toughness at the meso and microscale levels, b) experimentally demonstrate the loss mechanisms and mode mixity effects on the structural integrity of PZT/Silicon interfaces, and c) formulate a law for the energy release rate and the fracture toughness that account for the materials anisotropy at the PZT/Silicon interface. In addition, viscous loss mechanisms for the PZT material and the nature of structural losses for the silicon will be investigated. In the educational plan the PI proposes to increase and modernize student involvement in the ongoing research, within and outside the Mechanical and Aerospace Engineering Department, by promoting research transfer into classrooms, and simultaneously increasing the number of women represented in engineering. To increase the gender diversity, the PI will collaborate with Douglass College of Women. Among other activities, a seminar series, with distinguished women in the field, will be held in order to attract more women and minorities in engineering. The PI proposes to develop a new course in which she will promote state-of-the-art experimental techniques, modern principles and methods of analysis used in the study of MEMS. The syllabus of the course will be closely related to the proposed program in order to create a direct link between research and teaching.***