POWRE: Properties of Amorphous Diamond-like Carbon Films; Research Enhancement at the University of Toronto

POWRE：非晶类金刚石碳膜的特性；

• 批准号: 0074682
• 负责人: Tatiana Allen
• 金额: $ 7.5万
• 依托单位: University of Tennessee Chattanooga
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-07-01 至 2003-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0074682&HistoricalAwards=false
• 关键词: POWRE; Properties; Amorphous; Diamond; like

This project aims to study physical and technological aspects of doping of a-C:H. The overall research goal of the project is to use the Saddle-Field Glow Discharge (SFGD) deposition method to produce a-C:H films with electrically efficient and controllable p- and n-type doping for subsequent use in microelectronic devices. The structural, optical and electrical properties of the samples will be characterized by a variety of techniques. Specific tasks include: (1) Obtain "hands-on" experience with a SFGD deposition system. (2) Optimize SFGD deposition parameters to provide controllable and electrically efficient p- and n-type type doping. (3) Study effects of substitution of hydrogen in an amorphous matrix by tritium. Understanding the effect of dangling bonds produced by tritium beta decay on the opto-electronic properties of materials will add to fundamental knowledge in the physics of amorphous semiconductors, and may lead to applications in opto-electronic devices. (4) Study possibilities of modifying film properties after deposition by annealing and free-electron laser irradiation. It will help her to overcome scientifically limited environment of a small teaching institution. The PI will acquire additional experimental skills in the area of thin film deposition. The anticipated outcomes from this project are a deeper understanding of (1) the growth and doping mechanisms of a-C:H, and (2) the physical properties of dangling bonds in tritiated amorphous semiconductors. Both outcomes will have fundamental and immediate practical impact. The long term benefits for the PI's research program will occur through both continued collaboration with University of Toronto researchers and the acquisition of the deposition equipment for her home institution. The expansion in the depth and scope of the PI's research will strengthen her position at UTC and in the larger research community, and make her an efficient role model for young women in science.%%% This is a research enhancement grant made under the Professional Opportunities for Women in Research and Education (POWRE) program. The project covers a sabbatical year and two consecutive summers, which the PI will spend doing full-time research at the Electrical and Computer Engineering Department of the University of Toronto, collaborating with Professor Stefan Zukotynski. The career-related goal of this proposal is to re-establish the PI, whose research career has been interrupted for three years, as an active researcher in the field of semiconductor physics/materials science. The POWRE award will provide the PI and her students with the opportunity to use world-class research facilities and to interact with leading researchers in the field of amorphous semiconductors. The research is expected to contribute basic materials science knowledge at a fundamental level of special relevance to the behavior of electronic materials. The project also places emphasis on the integration of research and education through undergraduate student participation in research. The project is co-supported by the Division of Materials Research, and the MPS OMA(Office of Multidisciplinary Activities). ***

本项目旨在研究a-C：H掺杂的物理和工艺方面。该项目的总体研究目标是使用鞍场辉光放电(SFGD)沉积方法来制备电高效且可控的p型和n型掺杂的a-C：H薄膜，以用于后续的微电子器件。样品的结构、光学和电学特性将通过各种技术进行表征。具体任务包括：(1)获得SFGD沉积系统的实践经验。(2)优化SFGD沉积参数，以提供可控且电效率高的p型和n型掺杂。(3)研究了氚对非晶态基质中氢的替代作用。了解氚β衰变产生的悬挂键对材料光电性质的影响将增加非晶态半导体物理学的基础知识，并可能导致在光电子器件中的应用。(4)研究了通过退火和自由电子激光辐照对沉积后的薄膜性能进行改性的可能性。这将帮助她克服一家小型教学机构的科学限制环境。PI将在薄膜沉积领域获得更多的实验技能。该项目的预期成果是更深入地了解(1)a-C：H的生长和掺杂机制，以及(2)氚非晶态半导体中悬挂键的物理性质。这两个结果都将产生根本性和立竿见影的实际影响。PI的研究项目的长期好处将通过与多伦多大学的研究人员继续合作以及为她的家乡机构购买沉积设备来实现。PI研究的深度和范围的扩大将加强她在UTC和更大的研究社区的地位，并使她成为科学领域年轻女性的有效榜样。%这是根据妇女在研究和教育中的职业机会(POWRE)计划提供的研究增强补助金。该项目包括一年的休假和连续两个夏天，PI将在多伦多大学电气和计算机工程系与Stefan Zukotynski教授合作进行全职研究。这项提议与职业相关的目标是重新建立被中断了三年的研究生涯的PI，成为半导体物理/材料科学领域的活跃研究员。POWRE奖将为PI和她的学生提供使用世界级研究设施并与非晶态半导体领域的领先研究人员互动的机会。这项研究有望在与电子材料行为特别相关的基础水平上贡献基本的材料科学知识。该项目还强调通过本科生参与研究来整合研究和教育。该项目由材料研究司和MPS OMA(多学科活动办公室)共同支持。***