Development of Equipment for Fabrication of Quantum Cellular Automata

量子元胞自动机制造设备的研制[j]。当前对纳米结构和纳米电子学的兴趣部分是由于当前电子设备的缩放限制。未来纳米电技术发展的一个关键障碍是图像化技术的发展以及图像化与器件制造的集成。在这个项目中，我们将开发用于制造未来纳米电子学中非常有前途的结构之一的设备。量子元胞自动机是有组织的量子点阵列，实现互连线和逻辑运算。我们将开发用于制造量子点阵列的设备，实现数字电子电路的所有基本特征。量子点阵列将使用硅兼容材料在硅衬底上制造。该阵列将具有适合在低温（4-77 K）下操作演示的量子点尺寸，并且所使用的技术将具有缩放到量子点尺寸的潜力，从而允许在室温下操作。我们将开发的仪器集成了量子点光刻，量子点生长和覆盖层，以及原位表征设备。这种设备将使针对未来数字电子学的广泛研究计划的发展成为可能。它将为未来的半导体器件和技术研究提供一个重点，具有与大学内外研究人员互动的强大潜力。这项研究将是高度跨学科的，并将通过参与研究项目和开发与我们的纳米结构研究特别相关的新课程材料，影响本科生的教育。

Development of Equipment for Fabrication of Quantum Cellular AutomataD.W. GreveECS-0079485Current interest in nanostructures and nanoelectronics is in part motivated by the perceived limits to scaling of current electronic devices. One critical barrier to the development of future nanoelectric technology is the development of techniques for patterning and the integration of patterning with device fabrication. In this project we will develop equipment for fabrication of one of the highly promising structures for future nanoelectronics. Quantum cellular automata are organized arrays of quantum dots which implement interconnection lines and logical operations. We will develop equipment for fabrication of quantum dot arrays which implement all the essential features of a digital electronic circuit. Quantum dot arrays will be fabricated on silicon substrates using silicon-compatible materials. The arrays will have a quantum dot size suitable for demonstration of operation at cryogenic temperatures (4-77 K) and the techniques used will have the potential for scaling to quantum dot sizes which will permit operation at room temperature. The apparatus we will develop integrates quantum dot lithography, growth of quantum dots and an overlayer, and in situ characterization facilities. This equipment will make possible development of a broad research program directed at future digital electronics. It will provide a focus for future semiconductor device and technology research, with strong potential for interactions with researchers both within and outside the university. This research will be highly interdisciplinary, and will also impact the education of undergraduate students through involvement in research projects and also through the develoment of new course materials specifically related to our nanostructure research.