Fabrication of functional surface of micro dies and development of equipment for evaluation of its tribological characteristics

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Surface treatments technology including surface finishing and surface coating on micro dies for the micro metal forming were developed in this study. Equipment for evaluation tribological characteristics during micro forming processes was developed. Various tribological phenomena according to down-sizing of the materials and dies were analyzed. Experiments with various materials and conditions were carried out to clarify the issues in micro forming processes and to be applied to a highly accurate, low-cost micro devices processing technology in the future.