Equipment for an Undergraduate Microfabrication Laboratory

物理（13）本计画的目的是利用多靶溅镀系统来提升微细加工实验室与课程作业的能力。这个新的实验室是用来给本科生在微电子器件的研究，开发和制造过程中使用的基本理解。此外，微制造技术正在不断地适应于其他应用，例如微机电系统（MEMS）、光学器件、生物医学器件、平板显示器（FPD）和传感器。微制造，无论生产什么设备，都将物理，化学，材料科学和几个工程学科的各个方面整合到一个容易识别的应用中。因此，在微细加工实验室进行的课程和项目是强调多学科和跨学科教育价值的自然论坛。在不提供工程学位的詹姆斯麦迪逊大学开发的课程和实验将旨在通过使用传统和新颖的软光刻技术，在本科课程的早期插入动手，跨学科的实验室经验。微加工实验室广泛用于高级课程和学生研究项目。其目标是让广泛的科学和技术本科生接触微加工技术。同样重要的是在跨学科的环境中培养团队合作和沟通能力，由来自多个部门的学生追求的课程和项目。在本科阶段的微加工技术经验有助于学生在这一领域的进一步工作，无论他们进入工业或研究生院。该项目还展示了在其他本科院校实施微细加工实验的可行性，并将其扩展到以前纳入的工程课程之外。许多行业将通过新的和创造性的应用微细加工技术进行革命;这场革命始于让更广泛的学生接触微细加工科学和技术。实验是改编自工程，物理，化学和材料科学的研究和教育文献。

Physics (13) The objective of this project is to use a multitarget sputter deposition system to enhance the capabilities of a Microfabrication Laboratory and course work. This new laboratory is used to give undergraduate students a fundamental understanding of the processes used in the research, development, and manufacture of microelectronic devices. Moreover, microfabrication technology is continually being adapted for other applications, such as microelectromechanical systems (MEMS), optics, biomedical devices, flat panel displays (FPDs), and sensors. Microfabrication, whatever the device being produced, integrates aspects of physics, chemistry, materials science, and several engineering disciplines into one readily recognized application. Consequently, courses and projects conducted in the Microfabrication Laboratory are natural forums in which to emphasize the value of multidisciplinary and interdisciplinary education. The courses and experiments developed at James Madison University, which does not offer engineering degrees, will be designed to insert hands- on, interdisciplinary laboratory experiences early in the undergraduate curriculum through the use of traditional and novel soft lithography techniques. The Microfabrication Laboratory is extensively used for upper level courses and student research projects. The goal is to expose a broad spectrum of undergraduate science and technology students to microfabrication techniques. Equally important is the emphasis on developing teamwork and communication skills in an interdisciplinary environment, with courses and projects pursued by students from multiple departments. Experience with microfabrication techniques at the undergraduate level helps prepare students for further work in this area, whether they enter industry or graduate school. The project also demonstrates the feasibility of implementing microfabrication experiments at other undergraduate institutions and extending them beyond the engineering curricula in which they have previously been incorporated. Many industries will be revolutionized by new and creative application of microfabrication technologies; this revolution begins by exposing a broader audience of students to microfabrication science and technology. Experiments are being adapted from the research and education literature in engineering, physics, chemistry, and materials science.