SBIR Phase II: Integrated Reactor Scale and Topography Feature Scale Simulator for Plasma Enhanced Semiconductor Processes

这个小型企业创新研究（SBIR）第二阶段项目将提供一个商业软件工具，集成反应器规模，（前）鞘传输，并全面分析热化学气相沉积和低压等离子体工艺在集成电路制造的功能规模模型。 第二阶段将专注于开发（预）鞘模型、特征尺度模拟工具、充电模型以及专有软件（称为CFD-ACE+）中的支持基础设施，以集成这些模型。 第一阶段的（预）鞘模型将得到增强，以解决额外的常见等离子体反应堆操作条件。 将开发一个基于现有专有软件的多物理场模型并嵌入反应堆模型的特征尺度模拟器。 表面充电的模型将与（前）鞘和鞘离子传输模型和特征尺度模型集成。 软件基础设施将得到扩展，以简化所有特征尺度模拟器通用的模型定义步骤。该工具将为半导体行业的工程师提供一种预测反应器设计和工艺条件对他们生产的器件组件的尺寸，形状和质量的影响的方法。 它将扩展CFD-ACE+商业反应器规模建模软件，以便与特征规模模拟器正确对接。

This Small Business Innovation Research (SBIR) Phase II project will provide a commercial software tool that integrates reactor scale, (pre)sheath transport, and feature scale models for comprehensive analysis of thermal chemical vapor deposition and low pressure plasma processes in integrated circuit fabrication. Phase II will focus on development of (pre)sheath models, a feature scale simulation tool, a charging model, and the supporting infrastructure in proprietary software, called CFD-ACE+, to integrate these models. (Pre)sheath models from Phase I will be enhanced to address additional common plasma reactor operating conditions. A feature scale simulator, based on the multi-physics models of the existing proprietary software and embedded in the reactor model, will be developed. The model for surface charging will be integrated with the (pre)sheath and sheath models for ion transport and the feature scale models. The software infrastructure will be extended to simplify the model definition steps common to all feature scale simulators. This tool will provide engineers in the semiconductor industry with a means to predict the effect of both reactor designs and process conditions on the size, shape, and quality of the device components they are producing. It will extend the CFD-ACE+ commercial reactor scale modeling software to interface properly with feature scale simulators.