SBIR Phase II: Computational Tool for Plasma Equipment Design Using a Non-Statistical Boltzmann Solver

SBIR 第二阶段：使用非统计玻尔兹曼求解器进行等离子体设备设计的计算工具

• 批准号: 0091572
• 负责人: Vladimir Kolobov
• 金额: $ 49.99万
• 依托单位: CFD RESEARCH CORPORATION
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-03-15 至 2004-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0091572&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Computational; Tool

This Small Business Innovation Research (SBIR) Phase II project will further develop, validate and demonstrate a Computer-Aided Design (CAD) tool for plasma equipment/processes using a non-statistical Boltzmann solver for the analysis of charged particle kinetics. Phase I implemented a new Boltzmann module and clearly demonstrated the feasibility of coupling a Bolzmann solver to the company's plasma simulator for efficient kinetic description of low-pressure plasma reactors used in semiconductor manufacturing. The Phase II project will focus on: (1) the development of elliptic representation of the velocity distribution function (VDF) valid for arbitrary anisotropy of the VDF; (2) full integration of the Boltzmann solver with a commercial software; (3) kinetic simulations for industrial plasma systems; and (4) interfacing the Boltzmann module with plasma simulation codes developed by different research groups. Using an elliptic representation will extend the applicability of the Boltzmann solver to problems with arbitrary VDF anisotropy such as electron beams, ion kinetics, etc. The goal of Phase II will be to validate the new CAD tool for wide variety of plasma technologies and expand the software usage to new industries. The total commercial markets of plasma etch and Chemical Vapor Deposition (CVD) equipment is currently in excess of $2 billion per annum with strong projections for growth. Commercial application of the proposed software tool will allow optimization of the performance of all hardware equipment of this market and to "smartly" design new equipment. It is projected to "save" millions of dollars of equipment and process development costs to Plasma Equipment Manufacturers and to semiconductor chip producing companies.

该小型企业创新研究 (SBIR) 第二阶段项目将进一步开发、验证和演示用于等离子体设备/工艺的计算机辅助设计 (CAD) 工具，使用非统计玻尔兹曼求解器来分析带电粒子动力学。第一阶段实施了新的玻尔兹曼模块，并清楚地证明了将玻尔兹曼求解器与公司的等离子体模拟器耦合的可行性，以对半导体制造中使用的低压等离子体反应器进行有效的动力学描述。第二阶段项目将重点关注：（1）开发适用于任意各向异性的速度分布函数（VDF）的椭圆表示； (2)玻尔兹曼求解器与商业软件的全面集成； (3)工业等离子体系统的动力学模拟； (4) 将玻尔兹曼模块与不同研究小组开发的等离子体模拟代码连接。使用椭圆表示将扩展玻尔兹曼求解器的适用性，以解决具有任意 VDF 各向异性的问题，例如电子束、离子动力学等。第二阶段的目标是验证新的 CAD 工具适用于各种等离子体技术，并将软件的使用扩展到新行业。等离子蚀刻和化学气相沉积 (CVD) 设备的商业市场总额目前每年超过 20 亿美元，并且预计会有强劲的增长。所提出的软件工具的商业应用将允许优化该市场所有硬件设备的性能并“智能”地设计新设备。预计将为等离子体设备制造商和半导体芯片生产公司“节省”数百万美元的设备和工艺开发成本。