Development of a Low-Temp Scanning Tunneling Microscopy Facility with High-Resolution Electronic, Vibrational and Magnetic Spectroscopy Capabilities for Research and Education

开发具有高分辨率电子、振动和磁能谱分析能力的低温扫描隧道显微镜设备，用于研究和教育

• 批准号: 0116339
• 负责人: Ludwig Bartels
• 金额: $ 30万
• 依托单位: University of California-Riverside
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-09-01 至 2004-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0116339&HistoricalAwards=false
• 关键词: Development; Low; Temp; Scanning; Tunneling

This award from the Major Research Instrumentation Program supports the development of a high-resolution low-temperature scanning tunneling microscope (STM) for research and education in surface processing at the University of California-Riverside (UCR). The research apparatus is based on an STM with a temperature range between 10K and 350K. It will be set up to allows for in-situ sample excitation with laser pulses and electrons of several tens of electronvolts to 1kilo electronvolts energy. It will be used for the structural and spectroscopic analysis of adsorbates and films before and after their excitation similar to presently used or in the near future relevant surface process: direct optical excitation as it is used in optical lithography; optical excitation of the surface electronic temperatures to several hundred K for a time span of a few ps as induced by (ultra-)short laser pulses; excitation by impinging electrons of various energies as it is used in electron-beam lithography; excitation by low energy electrons from the tunneling current. The low-temperature capability of the instrument will permit to freeze out the reaction intermediates created by the various excitation modes. They are thus available for structural and spectroscopic analysis by STM. A comparison between the resultant products offers important insight into the elementary steps of the used reactions. The proposed instrument will be incorporated into the educational program of UCR in the context of an introductory course to semiconductor processing offered by the PI for senior undergraduate and graduate students of chemistry, physics and engineering. Additionally, it will be available to graduate students for their research projects. This award from the Major Research Instrumentation Program supports the development of a high-resolution low-temperature scanning tunneling microscope (STM) for research and education in surface processing at the University of California-Riverside (UCR). The research apparatus is based on an STM with a temperature range between 10K and 350K. It will be set up to allows for in-situ sample excitation with laser pulses and electrons of several tens of electronvolts to 1kilo electronvolts energy. It will be used for the structural and spectroscopic analysis of adsorbates and films before and after their excitation similar to presently used or in the near future relevant surface process: direct optical excitation as it is used in optical lithography; optical excitation of the surface electronic temperatures to several hundred K for a time span of a few ps as induced by (ultra-)short laser pulses; excitation by impinging electrons of various energies as it is used in electron-beam lithography; excitation by low energy electrons from the tunneling current. The low-temperature capability of the instrument will permit to freeze out the reaction intermediates created by the various excitation modes. They are thus available for structural and spectroscopic analysis by STM. A comparison between the resultant products offers important insight into the elementary steps of the used reactions. The proposed instrument will be incorporated into the educational program of UCR in the context of an introductory course to semiconductor processing offered by the PI for senior undergraduate and graduate students of chemistry, physics and engineering. Additionally, it will be available to graduate students for their research projects.

来自主要研究仪器计划的这一奖项支持加州大学河滨分校（UCR）开发高分辨率低温扫描隧道显微镜（STM），用于表面处理的研究和教育。研究装置是基于STM的，温度范围在10 K和350 K之间。它将被设置为允许在原位样品激发激光脉冲和电子的几十电子伏到1千伏的能量。它将用于吸附物和薄膜激发前后的结构和光谱分析，类似于目前使用的或在不久的将来使用的相关表面处理：直接光学激发，如在光学光刻中使用的;光学激发表面电子温度达到几百K，时间跨度为几ps，由（超）短激光脉冲引起;在电子束光刻中使用的各种能量的撞击电子的激发;来自隧穿电流的低能电子的激发。仪器的低温能力将允许冻结由各种激发模式产生的反应中间体。因此，它们可用于STM的结构和光谱分析。所得产物之间的比较提供了重要的洞察所使用的反应的基本步骤。拟议的仪器将被纳入UCR的教育计划的背景下，由PI提供的高年级本科生和研究生的化学，物理和工程的半导体加工的入门课程。此外，它将提供给研究生为他们的研究项目。来自主要研究仪器计划的这一奖项支持加州大学河滨分校（UCR）开发高分辨率低温扫描隧道显微镜（STM），用于表面处理的研究和教育。研究装置是基于STM的，温度范围在10 K和350 K之间。它将被设置为允许用激光脉冲和数十电子伏至1千电子伏能量的电子进行原位样品激发。它将用于吸附物和薄膜激发前后的结构和光谱分析，类似于目前使用的或在不久的将来使用的相关表面处理：直接光学激发，如在光学光刻中使用的;光学激发表面电子温度达到几百K，时间跨度为几ps，由（超）短激光脉冲引起;在电子束光刻中使用的各种能量的撞击电子的激发;来自隧穿电流的低能电子的激发。仪器的低温能力将允许冻结由各种激发模式产生的反应中间体。因此，它们可用于STM的结构和光谱分析。所得产物之间的比较提供了重要的洞察所使用的反应的基本步骤。拟议的仪器将被纳入UCR的教育计划的背景下，由PI提供的高年级本科生和研究生的化学，物理和工程的半导体加工的入门课程。此外，它将提供给研究生为他们的研究项目。