MRI: Acquisition of Fundamental Semiconductor Processing Capabilities for Education and Research in Hybrid Silicon/Molecule Processes and Devices

主要研究仪器计划为购买核心半导体处理工具提供资金，该工具是加州大学河滨分校(UCR)半导体研究培训设施所需的。这笔资金将用于购买化学气相沉积系统，用于有机/生物-硅混合装置的研究，并就与半导体加工有关的广泛专题进行研究培训。Nanomaster Inc.的新工具采用了双流程室设置，并允许分离富碳和碳敏感的加工步骤。这一工具的提供将推动UCR由NSF赞助的一系列项目，从与半导体加工环境兼容的有机器件组件的研究到在一个高中生继续接受大学教育的比率最低的地区之一的机构开发与半导体相关的课程。主要研究仪器计划为购买核心半导体处理工具提供资金，该工具是加州大学河滨分校(UCR)半导体研究培训设施所需的。这笔资金将用于购买化学气相沉积系统，用于有机/生物-硅混合装置的研究，并就与半导体加工有关的广泛专题进行研究培训。Nanomaster Inc.的新工具采用了双流程室设置，并允许分离富碳和碳敏感的加工步骤。这一工具的提供将推动UCR由NSF赞助的一系列项目，从与半导体加工环境兼容的有机器件组件的研究到在一个高中生继续接受大学教育的比率最低的地区之一的机构开发与半导体相关的课程。

The Major Research Instrumentation program provides funding for the acquisition of a core semiconductor processing tool that is required for a semiconductor research training facility at the University of California at Riverside (UCR). The funds will be used for the acquisition of a chemical vapor deposition system for research in organic/biological-silicon hybrid devices and research training in a broad range of topics related to semiconductor processing. The new tool from Nanomasters Inc. incorporates a dual process-chamber setup and allows for separation of carbon-rich and carbon-sensitive processing steps. Availability of this tool will forward a broad range of NSF-sponsored projects at UCR ranging from research in organic device components compatible with a semiconductor-processing environment to the development of a semiconductor-related curriculum at a institution that is located in an area which has one of the lowest rate of high school students continuing towards collegiate education. The Major Research Instrumentation program provides funding for the acquisition of a core semiconductor processing tool that is required for a semiconductor research training facility at the University of California at Riverside (UCR). The funds will be used for the acquisition of a chemical vapor deposition system for research in organic/biological-silicon hybrid devices and research training in a broad range of topics related to semiconductor processing. The new tool from Nanomasters Inc. incorporates a dual process-chamber setup and allows for separation of carbon-rich and carbon-sensitive processing steps. Availability of this tool will forward a broad range of NSF-sponsored projects at UCR ranging from research in organic device components compatible with a semiconductor-processing environment to the development of a semiconductor-related curriculum at a institution that is located in an area which has one of the lowest rate of high school students continuing towards collegiate education.