MRI: Acquisition of Fundamental Semiconductor Processing Capabilities for Education and Research in Hybrid Silicon/Molecule Processes and Devices

MRI：获得用于混合硅/分子工艺和设备教育和研究的基本半导体处理能力

• 批准号: 0421325
• 负责人: Ludwig Bartels
• 金额: $ 18.6万
• 依托单位: University of California-Riverside
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2007-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0421325&HistoricalAwards=false
• 关键词: MRI; Acquisition; Fundamental; Semiconductor; Processing

The Major Research Instrumentation program provides funding for the acquisition of a core semiconductor processing tool that is required for a semiconductor research training facility at the University of California at Riverside (UCR). The funds will be used for the acquisition of a chemical vapor deposition system for research in organic/biological-silicon hybrid devices and research training in a broad range of topics related to semiconductor processing. The new tool from Nanomasters Inc. incorporates a dual process-chamber setup and allows for separation of carbon-rich and carbon-sensitive processing steps. Availability of this tool will forward a broad range of NSF-sponsored projects at UCR ranging from research in organic device components compatible with a semiconductor-processing environment to the development of a semiconductor-related curriculum at a institution that is located in an area which has one of the lowest rate of high school students continuing towards collegiate education. The Major Research Instrumentation program provides funding for the acquisition of a core semiconductor processing tool that is required for a semiconductor research training facility at the University of California at Riverside (UCR). The funds will be used for the acquisition of a chemical vapor deposition system for research in organic/biological-silicon hybrid devices and research training in a broad range of topics related to semiconductor processing. The new tool from Nanomasters Inc. incorporates a dual process-chamber setup and allows for separation of carbon-rich and carbon-sensitive processing steps. Availability of this tool will forward a broad range of NSF-sponsored projects at UCR ranging from research in organic device components compatible with a semiconductor-processing environment to the development of a semiconductor-related curriculum at a institution that is located in an area which has one of the lowest rate of high school students continuing towards collegiate education.

主要研究仪器计划为加州大学滨江（UCR）半导体研究培训设施所需的核心半导体处理工具的收购提供资金。这笔资金将用于购买化学气相沉积系统，用于有机/生物硅混合器件的研究，以及与半导体加工相关的广泛主题的研究培训。Nanomasters Inc.的新工具采用了双处理室设置，并允许分离富碳和碳敏感的处理步骤。该工具的可用性将在加州大学河滨分校推出广泛的NSF赞助项目，从与半导体加工环境兼容的有机器件组件的研究到位于高中生继续接受大学教育的最低比率地区的机构的半导体相关课程的开发。 主要研究仪器计划为加州大学滨江（UCR）半导体研究培训设施所需的核心半导体处理工具的收购提供资金。这笔资金将用于购买化学气相沉积系统，用于有机/生物硅混合器件的研究，以及与半导体加工相关的广泛主题的研究培训。Nanomasters Inc.的新工具采用了双处理室设置，并允许分离富碳和碳敏感的处理步骤。该工具的可用性将在加州大学河滨分校推出广泛的NSF赞助项目，从与半导体加工环境兼容的有机器件组件的研究到位于高中生继续接受大学教育的最低比率地区的机构的半导体相关课程的开发。