Undergraduate Microfabrication Laboratory for Microelectronics and MEMS Technology

微电子与MEMS技术本科生微加工实验室

• 批准号: 0127112
• 负责人: Jennifer English
• 金额: $ 10.45万
• 依托单位: University of Alabama in Huntsville
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-01-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0127112&HistoricalAwards=false
• 关键词: Undergraduate; Microfabrication; Laboratory; Microelectronics; MEMS

Engineering - Electrical (55)The project is adapting and implementing a pair of laboratory courses to teach the microfabrication techniques required to create microdevices. Materials and instrumentation for microfabrication techniques are being procured and constructed in a laboratory, and process sequences are being adapted from similar programs and implemented in the laboratory. Using these facilities and techniques, students are making transistors and simple MEMS devices. Assessment involves student course evaluations and peer review where faculty, industrial and government representatives interested in microfabrication examine the course content, student work, and student course evaluations. Dissemination plans include reporting results in journal and conference publications and on a web site and developing an Internet-based course on microfarication.

工程-电气(55)该项目正在调整和实施两门实验室课程，以教授制造微型设备所需的微制造技术。用于微加工技术的材料和仪器正在实验室中采购和建造，工艺序列正在从类似的计划中改编并在实验室中实施。利用这些设施和技术，学生们正在制造晶体管和简单的MEMS器件。评估包括学生课程评估和同行评议，对微细加工感兴趣的教师、工业和政府代表检查课程内容、学生作业和学生课程评估。传播计划包括在期刊和会议出版物以及网站上报告成果，并开发一门基于互联网的微细化课程。