COLLABORATIVE RESEARCH: SENSORS: Inductively Coupled Flexural Wave Resonator Sensing

合作研究：传感器：电感耦合弯曲波谐振器传感

• 批准号: 0427994
• 负责人: Jennifer English
• 金额: $ 17.13万
• 依托单位: University of Alabama in Huntsville
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0427994&HistoricalAwards=false
• 关键词: COLLABORATIVE; RESEARCH; SENSORS; Inductively; Coupled

Microelectromechanical systems (MEMS) have been developed into numerous physical sensors. While individual sensors have demonstrated the viability of the technology, many applications require arrays of many different sensors. Development of efficient methods to monitor resonant sensor arrays is proposed including the integration of the monitoring system with micromechanical sensor arrays. Microsystems for monitoring temperature, pressure, acceleration, rotation, stress, chemicals, biological agents and other physical parameters have been developed. Often information for more than one parameter or single parameters at numerous locations is required. A method to probe numerous sensors simultaneously will be developed. The method is based on energy absorption of resonant sensing circuits. Energy absorption techniques are well known in spectroscopy but have not been applied to sensor arrays. Rather than look at the energy emission and absorption of atomic transitions in materials, energy absorption of sensing arrays will be investigated using similar techniques. The sensor that will initially be integrated into the sensing system will be the flexural plate resonator. This sensor was chosen because it has been demonstrated for both chemical and biological agents, operates in liquid and vapor environments, has resonant frequencies in the megahertz range and can be easily microfabricated using standard techniques. The resonant sensor will be manufactured to have a resonant frequency that is within the electrical absorption frequencies of an inductor-capacitor circuit. Electrical energy will inductively couple into the electrical circuit and drive the sensor into resonance. The absorption of the electrical and mechanical energy will effectively change the impedance of the driving circuit, the maximum change being at the mechanical resonance of the sensor. The resonant frequency will vary with changes in the mass and stresses of the structure. This is made sensitive to different agents by coating the resonant surface with thin film sorption layers. Combining numerous sensors will create an absorption spectrum that can be used to monitor resonances by FM spectroscopy techniques. The system will sweep the frequency and lock to each resonance, record the value then continue the sweep to the next resonance, much like the scan button on car radios. The intellectual merit of this research is the development of wireless sensor interrogation technology and the application of these technologies to interdisciplinary problems that require sensors. The goal of this research is to develop a wireless telemetry system for remotely interrogating arrays of resonant MEMS sensors based on the absorption of electrical energy through inductive coupling. These sensors and sensing system would have applications as chemical vapor and biochemical detectors, as well as strain, humidity, pressure and acceleration sensors. The broader impact of this research is the continued integration of sensor technology with microelectromechanical systems and radio frequency identification. This work will lay the foundation to create a system that will passively monitor parameters, store the information through electrical or mechanical means and transmit the data when probed. This research will increase the investigators knowledge base and expertise in system performance assessment, and this research will also impact the education of both graduate and undergraduate students through the respective university curriculum and student research programs. The multi-disciplinary features of this research will require graduate students of mechanical, electrical and chemical engineering to interact to solve the stated problem.

微机电系统（MEMS）已经发展成为许多物理传感器。虽然单个传感器已经证明了该技术的可行性，但许多应用需要许多不同传感器的阵列。 发展有效的方法来监测谐振传感器阵列，提出了包括集成的监测系统与微机械传感器阵列。用于监测温度、压力、加速度、旋转、应力、化学品、生物制剂和其他物理参数的微系统已经开发出来。通常需要多个位置的多个参数或单个参数的信息。将开发一种同时探测多个传感器的方法。该方法是基于谐振传感电路的能量吸收。能量吸收技术在光谱学中是众所周知的，但尚未应用于传感器阵列。而不是看在材料中的原子跃迁的能量发射和吸收，传感阵列的能量吸收将使用类似的技术进行研究。 最初将被集成到传感系统中的传感器将是弯曲板谐振器。之所以选择这种传感器，是因为它已被证明用于化学和生物制剂，在液体和蒸汽环境中工作，具有兆赫范围内的谐振频率，并且可以使用标准技术容易地进行微制造。谐振传感器将被制造成具有在电感器-电容器电路的电吸收频率内的谐振频率。电能将感应耦合到电路中并驱动传感器谐振。电能和机械能的吸收将有效地改变驱动电路的阻抗，最大的改变发生在传感器的机械谐振处。共振频率将随着结构的质量和应力的变化而变化。通过在谐振表面涂上薄膜吸附层，使其对不同的试剂敏感。 结合众多的传感器将创建一个吸收光谱，可用于监测共振调频光谱技术。该系统将扫描频率并锁定到每个谐振，记录值，然后继续扫描到下一个谐振，就像汽车收音机上的扫描按钮一样。 这项研究的智力价值是无线传感器询问技术的发展，以及这些技术在需要传感器的跨学科问题中的应用。 本研究的目标是开发一种无线遥测系统，用于远程询问谐振MEMS传感器阵列，其基于通过电感耦合吸收电能。这些传感器和传感系统将具有作为化学蒸气和生化检测器以及应变、湿度、压力和加速度传感器的应用。这项研究的更广泛影响是传感器技术与微机电系统和射频识别的持续集成。这项工作将为创建一个系统奠定基础，该系统将被动地监测参数，通过电气或机械手段存储信息，并在探测时传输数据。 这项研究将增加调查人员的知识基础和系统性能评估的专业知识，这项研究也将通过各自的大学课程和学生研究计划影响研究生和本科生的教育。 这项研究的多学科特点将需要机械，电气和化学工程的研究生进行互动，以解决所述的问题。