MRI Instrumentation Development: Nanolithography Using Scanning Tunneling Microscope (STM) and Local Electrostatic Discharge

MRI 仪器开发：使用扫描隧道显微镜 (STM) 和局部静电放电的纳米光刻

• 批准号: 0215867
• 负责人: Romel Gomez
• 金额: $ 25.55万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-08-01 至 2004-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0215867&HistoricalAwards=false
• 关键词: MRI; Instrumentation; Development; Nanolithography; Using

This Major Research Instrumentation (MRI) award provides funds to develop an instrument to create structures on semiconductor, metallic and oxide surfaces at the nanometer length scales. A research grade electrostatic discharge machine will be purchased and will be modified to enable substantially improved resolution. A new vacuum nanolithography tool will be constructed, which utilizes the principle of proximal probe technique wherein the highly controlled electrostatic discharge between surface and tip can dissociate atoms on the target surface with a high degree of specificity. The equipment will be used to create semiconductor and magnetic devices with nanometer dimensions in order to exploit quantum mechanical behavior such as quantization of resistance and nano-contact ballistic magnetoresistance. This project will improve upon current manufacturing capability down to1 nm feature size and will allow relatively inexpensive fabrication of quantum devices. It will be designed as a bolt-on addition to existing charged particle lithography tools such as focused ion beam milling machines as well as standard electron microscopes; and can be used by university researchers in various departments including chemical engineering, materials science, as well as chemistry and biochemistry. It will further strengthen the University of Maryland, College Park, in the field of nanostructures and can promote advances in nanomachining. The technique is straightforward and can be transferred readily to various universities and research laboratories. The instrumentation can be converted for use to either add or remove material by a straightforward replacement of the fluid layer, and being vacuum-based, it is compatible with semiconductor manufacturing processes. Nanostructures could thus be made relatively inexpensively and could stimulate vigorous research and development of artificial nanostructures.

这项重大研究仪器（MRI）奖提供资金，以开发一种仪器，在纳米长度尺度上在半导体，金属和氧化物表面上创建结构。 将购买一台研究级静电放电机器，并将对其进行修改，以大幅提高分辨率。 将构建一种新的真空纳米光刻工具，其利用近端探针技术的原理，其中表面和尖端之间的高度受控的静电放电可以高度特异性地解离目标表面上的原子。该设备将用于制造纳米尺寸的半导体和磁性器件，以利用量子力学行为，如电阻和纳米接触弹道磁阻的量子化。 该项目将提高目前的制造能力，将特征尺寸降低到1纳米，并将允许相对便宜的量子器件制造。 它将被设计为现有带电粒子光刻工具（如聚焦离子束铣床和标准电子显微镜）的附加产品;可供大学研究人员在化学工程，材料科学以及化学和生物化学等各个部门使用。它将进一步加强马里兰州大学帕克分校在纳米结构领域的实力，并可促进纳米机械的进步。该技术简单明了，可以很容易地转移到各个大学和研究实验室。 该仪器可以转换用于通过直接更换流体层来添加或去除材料，并且是基于真空的，它与半导体制造工艺兼容。因此，纳米结构可以相对便宜地制造，并可以刺激人工纳米结构的积极研究和开发。