Integration of Wear-resistant and Anti-stiction Coatings Deposited from Waterborne Chemistries into Micro-electromechanical System Fabrication Processes

将水性化学沉积的耐磨和抗粘涂层集成到微机电系统制造工艺中

• 批准号: 0221865
• 负责人: Srini Raghavan
• 金额: $ 24万
• 依托单位: University of Arizona
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-09-01 至 2006-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0221865&HistoricalAwards=false
• 关键词: Integration; Wear; resistant; Anti; stiction

The objective of the proposed research is to develop the chemistry and techniques for the application of duplex wear resistant and anti-stiction coatings; onto polysilicon MEMS based structures from aqueous media. The anti-stiction properties will be evaluated through a characterization of the hydrophobicity of the coated surfaces under different temperature and humidly conditions. Friction and wear properties of the deposited coatings will be investigated using friction force microscopy. By working in collaboration with Sandia National Laboratories, a GOALI partner in the proposed research, coatings will be applied to test structures and the wear between coated surfaces will be measured using a microtribometer device. Using atomistic computer simulation methods, viz. molecular dynamics, the relation between the chemical structure of coatings and their friction/wear properties will be explored. Designing anti-stiction and wear resistant coating begins with linking molecular structures, coating structure and morphology to film properties. Objectives of molecular level simulations are to understand the evolution of the coating structure during sliding as well as shedding light on the tribo-chemical processes in the anti-stiction film under dynamic rubbing conditions. The modeling work is driven by a need to compare simulated friction and wear properties of anti-stiction coating with experimental observations and gaining further insight into the physics and chemistry at scales inaccessible by experiments.The research project will provide educational and research opportunities to graduate, undergraduate and post-doctoral students. The principal investigators of the research program have a strong history of involving underrepresented minority and female students in their research program through regular and REU research programs. The results from this work will be used to enhance the content of courses in applied surface chemistry and atomistic computation techniques taught in the department of Materials Science and Engineering as well as a teaching module for use in an IC fabrication class taught at the University of Arizona.

拟议的研究的目的是开发双重耐磨和抗静摩擦涂层的应用化学和技术;从水介质到多晶硅MEMS为基础的结构。通过表征不同温度和湿度条件下涂层表面的疏水性来评价抗静摩擦性能。将使用摩擦力显微镜研究沉积涂层的摩擦和磨损性能。通过与GOALI合作伙伴Sandia国家实验室合作，将涂层应用于测试结构，并使用微摩擦计设备测量涂层表面之间的磨损。利用原子计算机模拟方法，即分子动力学，涂层的化学结构和它们的摩擦/磨损性能之间的关系将被探索。抗粘耐磨涂层的设计首先要将分子结构、涂层结构和形貌与涂层性能联系起来。分子水平模拟的目的是了解涂层结构在滑动过程中的演变，以及在动态摩擦条件下的抗静摩擦膜中的摩擦化学过程。模拟工作是由需要比较模拟的摩擦和磨损性能的抗静摩擦涂层与实验观察，并获得进一步的洞察力的物理和化学的规模无法通过实验驱动。该研究项目将提供教育和研究的机会，研究生，本科生和博士后学生。该研究计划的主要研究人员有一个强大的历史，涉及代表性不足的少数民族和女学生在他们的研究计划，通过定期和REU研究计划。这项工作的结果将用于提高材料科学与工程系教授的应用表面化学和原子计算技术课程的内容，以及用于亚利桑那大学教授的IC制造课程的教学模块。