Establishing an I/UCRC Center Site for Microcontamination Control at Northeastern University

在东北大学建立 I/UCRC 微污染控制中心

• 批准号: 0225178
• 负责人: Ahmed Busnaina
• 金额: $ 25万
• 依托单位: Northeastern University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-07-15 至 2006-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0225178&HistoricalAwards=false
• 关键词: Establishing; UCRC; Center; Site; Microcontamination

The Industry/University Cooperative Research Center research site at Northeastern University will work jointly with the industrial members and the existing Microcontamination Control center at the University of Arizona and Rensselaer Polytechnic Institute to develop solutions that will improve the industry's yield and contribute to their competitiveness. The industrial members at all three sites will share the research results of all the sites.The research focuses on the fundamentals of surface cleaning and preparation, particle adhesion and removal mechanisms, reduction of the use of chemicals through dilute chemistries, cryogenic aerosols and supercritical fluids (such as supercritical CO2) and reduction of water use through increased cleaning efficiency. Contamininants in gases will also be addressed through physical modeling of particle generation, transport, deposition resulting in contamination in thin film process. The center will also work toward the development of micro-sensors that can be used to detect impurities insitu in ultra pure gases used in semiconductor and other processes.

东北大学的工业/大学合作研究中心研究中心将与工业成员以及亚利桑那大学和伦斯勒理工学院现有的微污染控制中心共同开发解决方案，以提高行业产量并提高其竞争力。 这三个工厂的工业成员将分享所有工厂的研究成果，研究重点是表面清洁和准备、颗粒粘附和去除机制、通过稀释化学品、低温气溶胶和超临界流体（如超临界CO2）减少化学品的使用，以及通过提高清洁效率减少水的使用。 气体中的污染物也将通过物理模型的颗粒产生，传输，沉积导致薄膜工艺中的污染。 该中心还将致力于开发微型传感器，用于原位检测半导体和其他工艺中使用的超纯气体中的杂质。