Integrated Sensing: CMOS Intgerated Gas Sensor Array Chip Using SAW Technology

集成传感：采用 SAW 技术的 CMOS 集成气体传感器阵列芯片

• 批准号: 0225431
• 负责人: Mona Zaghloul
• 金额: $ 15万
• 依托单位: George Washington University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-09-15 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0225431&HistoricalAwards=false
• 关键词: Integrated; Sensing; CMOS; Intgerated; Gas

0225431ZaghloulFor the purposes of public safety, health and wellness, it is often critical to haveavailable smart sensors that can detect and identify toxic and poisonous gases in the air. Here the PIs seek low cost arrays of SAW gas sensors clustered as a network node that can be placed and operated with minimal supervision, yield continuous real time monitoring capability through the network and are based on well established CMOS/MEMS technology. Since the sensors are fabricated employing CMOS technology, additional signal processing circuitry can easily be integrated into the chip thereby readily providing functions, such as, multiplexing and analog-to-digital conversion, i.e., Systems On a Chip (SOC). The proposed CMOS design offers other potential benefits, such as, temperature drift control and noise immunity. The chips will be designed at The George Washington University and fabricated by the MOSIS service. Select post-fabrication steps will be performed by the MEMS Exchange and the Naval Research Laboratory (NRL), Chemistry Division. This proposal addresses the critical research issues, estimated time line of tasks and educational opportunities for undergraduate and graduate students.

为了公共安全、健康和健康，拥有能够检测和识别空气中有毒和有毒气体的智能传感器往往是至关重要的。在这里，PI寻找作为网络节点的低成本SAW气体传感器阵列，该网络节点可以在最少的监督下放置和操作，通过网络产生连续的实时监控能力，并且基于成熟的CMOS/MEMS技术。由于传感器是使用CMOS技术制造的，因此可以很容易地将额外的信号处理电路集成到芯片中，从而容易地提供功能，例如多路复用和模数转换，即片上系统(SOC)。该设计还提供了其他潜在的优势，如温度漂移控制和抗噪能力。这些芯片将在乔治·华盛顿大学设计，并由MOSIS服务公司制造。选定的制造后步骤将由MEMS交换和化学司海军研究实验室(NRL)执行。这项建议涉及关键的研究问题、任务的预计时间线以及本科生和研究生的教育机会。