Integrated Sensing: CMOS Intgerated Gas Sensor Array Chip Using SAW Technology

0225431 Zaghloul为了公共安全、健康和保健的目的，拥有可以检测和识别空气中有毒气体的智能传感器通常至关重要。在这里，PI寻求低成本的SAW气体传感器阵列，这些SAW气体传感器集群作为网络节点，可以在最小的监督下放置和操作，通过网络产生连续的真实的时间监测能力，并且基于完善的CMOS/MEMS技术。由于传感器是采用CMOS技术制造的，因此附加的信号处理电路可以容易地集成到芯片中，从而容易地提供功能，例如多路复用和模数转换，即，片上系统（SOC）。提出的CMOS设计提供了其他潜在的好处，如，温度漂移控制和噪声免疫力。这些芯片将在乔治华盛顿大学设计，并由MOSIS服务制造。选定的制造后步骤将由MEMS交易所和海军研究实验室（NRL）化学部执行。这项建议涉及关键的研究问题，估计的任务时间线和本科生和研究生的教育机会。

0225431ZaghloulFor the purposes of public safety, health and wellness, it is often critical to haveavailable smart sensors that can detect and identify toxic and poisonous gases in the air. Here the PIs seek low cost arrays of SAW gas sensors clustered as a network node that can be placed and operated with minimal supervision, yield continuous real time monitoring capability through the network and are based on well established CMOS/MEMS technology. Since the sensors are fabricated employing CMOS technology, additional signal processing circuitry can easily be integrated into the chip thereby readily providing functions, such as, multiplexing and analog-to-digital conversion, i.e., Systems On a Chip (SOC). The proposed CMOS design offers other potential benefits, such as, temperature drift control and noise immunity. The chips will be designed at The George Washington University and fabricated by the MOSIS service. Select post-fabrication steps will be performed by the MEMS Exchange and the Naval Research Laboratory (NRL), Chemistry Division. This proposal addresses the critical research issues, estimated time line of tasks and educational opportunities for undergraduate and graduate students.