Integrated Sensing: Collaborative Research: Development of Multifunctional Wireless Sensory Microsystems with Integrated Nanoelectromechanical Devices

纳米尺度科学技术的最新进展为分布式无线传感器网络中的超小型低功耗传感器节点的开发提供了新的方法，这些传感器节点用于环境监测、民用基础设施监测、基于状态的维护、安全和监视等应用。纳米机电系统（NEMS）的尺寸和质量的降低对于高灵敏度的力和质量传感具有极大的兴趣。我们提出了一种新的技术的基础上组装的纳米结构的纳米机械传感器，而不是从基板材料直接加工。纳米机械传感结构将使用“自下而上”的合成，然后表面组装和集成与铸造制造的单片电路通过电流体组装，允许芯片上集成的纳米机械传感器与转导，读出，处理和通信电路。这种方法还提供了灵活性和可扩展性，能够组装更大范围的功能结构。凭借我们在NEMS器件开发和模拟/RF/微波IC设计方面的核心竞争力，我们将开发一个基于微功率纳米传感器的微系统，其中包含纳米传感器组装/集成位置，传感器特定的转换和读出电子器件。这些研究活动与相关的教育/推广目标相辅相成。其中包括为夏季微电子研讨会奠定基础，该研讨会将为当地高中教师提供洁净室研究经验。该试点计划为K-12科学和数学教育带来了重大影响。这些教学和研究活动的结合将使一个完整的学术计划，桥梁之间的差距“自下而上”的纳米技术和微系统的差距。更具体地说，所提出的集成纳米传感器的电流体组件与预制的功能电路代表了现实的可能性，可以“感觉，思考，或沟通”的集成纳米系统的发展。

Recent advances in nanometer scale science and technology offer novel approaches for the development of ultra-miniature low-power sensor nodes for distributed wireless sensor networks in applications such as environmental monitoring, civil infrastructure monitoring, condition-based maintenance, security and surveillance. The reduced dimensions and masses of nanoelectromechanical systems (NEMS) are of great interest for highly-sensitive force- and mass-sensing. We propose a novel technology based on assembly of nanostructured nanomechanical sensors rather than their direct machining from the substrate material. Nanomechanical sensing structures will be produced using "bottom-up" synthesis, then surface assembled and integrated with foundry-fabricated monolithic circuits through electrofluidic assembly, allowing on-chip integration of nanomechanical sensors with transduction, readout, processing, and communications circuitry. This approach also offers flexibility and scalability, enabling the assembly of a larger range of functional structures. Leveraging our core competencies in NEMS device development and analog/RF/microwave IC design, we will develop a micropower nanosensor-based microsystem containing nanosensor assembly/integration sites, sensor-specific transduction, and read-out electronics.These research activities are complemented with related education/outreach goals. These include the groundwork for Summer Microelectronics Workshops that will provide cleanroom research experiences to local high-school teachers. This pilot program offers the promise for substantial impact in K-12 science and mathematics education. The combination of these pedagogical and research activities will enable a complete academic program that bridges the gap between "bottom-up" nanotechnology and microsystems. More specifically, the proposed integration of electrofluidic assembly of nanosensors with prefabricated functional circuits represents realistic possibilities for the development of Integrative Nanosystems that can "sense, think, or communicate".