Integrated Sensing: Collaborative Research: Development of Multifunctional Wireless Sensory Microsystems with Integrated Nanoelectromechanical Devices

集成传感：协作研究：开发具有集成纳米机电器件的多功能无线传感微系统

• 批准号: 0225496
• 负责人: Sanjay Raman
• 金额: $ 7.5万
• 依托单位: Virginia Polytechnic Institute and State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-01-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0225496&HistoricalAwards=false
• 关键词: Integrated; Sensing; Collaborative; Research; Development

Recent advances in nanometer scale science and technology offer novel approaches for the development of ultra-miniature low-power sensor nodes for distributed wireless sensor networks in applications such as environmental monitoring, civil infrastructure monitoring, condition-based maintenance, security and surveillance. The reduced dimensions and masses of nanoelectromechanical systems (NEMS) are of great interest for highly-sensitive force- and mass-sensing. We propose a novel technology based on assembly of nanostructured nanomechanical sensors rather than their direct machining from the substrate material. Nanomechanical sensing structures will be produced using "bottom-up" synthesis, then surface assembled and integrated with foundry-fabricated monolithic circuits through electrofluidic assembly, allowing on-chip integration of nanomechanical sensors with transduction, readout, processing, and communications circuitry. This approach also offers flexibility and scalability, enabling the assembly of a larger range of functional structures. Leveraging our core competencies in NEMS device development and analog/RF/microwave IC design, we will develop a micropower nanosensor-based microsystem containing nanosensor assembly/integration sites, sensor-specific transduction, and read-out electronics.These research activities are complemented with related education/outreach goals. These include the groundwork for Summer Microelectronics Workshops that will provide cleanroom research experiences to local high-school teachers. This pilot program offers the promise for substantial impact in K-12 science and mathematics education. The combination of these pedagogical and research activities will enable a complete academic program that bridges the gap between "bottom-up" nanotechnology and microsystems. More specifically, the proposed integration of electrofluidic assembly of nanosensors with prefabricated functional circuits represents realistic possibilities for the development of Integrative Nanosystems that can "sense, think, or communicate".

纳米尺度科学技术的最新进展为开发用于分布式无线传感器网络的超小型低功耗传感器节点提供了新方法，用于环境监测、民用基础设施监测、状态维护、安全和监视等应用。纳米机电系统（NEMS）的减小尺寸和质量是高灵敏度力和质量传感的重要研究方向。我们提出了一种基于组装纳米结构纳米机械传感器的新技术，而不是直接从衬底材料加工纳米机械传感器。纳米机械传感结构将采用“自下而上”的合成方法生产，然后通过电流体组装与代工厂制造的单片电路进行表面组装和集成，从而实现纳米机械传感器与转导、读出、处理和通信电路的片上集成。这种方法还提供了灵活性和可伸缩性，能够组装更大范围的功能结构。利用我们在NEMS器件开发和模拟/射频/微波IC设计方面的核心竞争力，我们将开发一种基于微功率纳米传感器的微系统，该微系统包含纳米传感器组装/集成位点、传感器特定转导和读出电子器件。这些研究活动还辅之以有关的教育/外联目标。其中包括夏季微电子研讨会的基础工作，该研讨会将为当地高中教师提供洁净室研究经验。这个试点项目有望对K-12科学和数学教育产生重大影响。这些教学和研究活动的结合将使一个完整的学术项目成为可能，在“自下而上”的纳米技术和微系统之间架起一座桥梁。更具体地说，将纳米传感器的电流体组装与预制功能电路相结合，为开发能够“感知、思考或交流”的集成纳米系统提供了现实的可能性。