SGER: Miniature Temperature Sensors for Harsh Environments and Studying Energy Transport at Microscales

SGER：适用于恶劣环境和研究微尺度能量传输的微型温度传感器

• 批准号: 0240020
• 负责人: Thomas Mackin
• 金额: $ 5.34万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0240020&HistoricalAwards=false
• 关键词: SGER; Miniature; Temperature; Sensors; Harsh

This research advances the capabilities for performing thermal measurements at small scales, which in turn, facilitates the design, development, and production of devices and systems for commercial and government applications based on micro- and nanotechnologies. Micro- and nanosystems are enabling innumerable exciting and beneficial applications for society; however, many challenges are created by miniaturization including thermal measurement at small scales, below 100 microns. The development of alternative and easy to use thermal metrology methods is necessary for the design, development, and optimization of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The temperature sensors are based on the thermomechanical response of a structure when heated so that it thermal expands differently than the underlying substrate. Since only optical access is needed to make the measurement, this temperature-sensing scheme can be used in harsh environments, e.g. high temperatures, where electrical signals can no longer be obtained. Additionally, these microsensors will be used to study fundamental issues of microscale energy transport such as the amount of convection and radiation at small scales. This research program will train students in fabrication and characterization skills needed in micro- and nanotechnology industries, and the results will be broadly disseminated to the scientific community and public. The award is funded by the Thermal Transport and Thermal Processing Program of the Chemical and Transport Systems Division.

这项研究提高了在小规模下进行热测量的能力，这反过来又促进了基于微米和纳米技术的商业和政府应用的设备和系统的设计、开发和生产。 微米和纳米系统正在为社会带来无数令人兴奋和有益的应用;然而，小型化带来了许多挑战，包括100微米以下小尺度的热测量。 替代和易于使用的热计量方法的发展是必要的微机电系统（MEMS）和纳机电系统（NEMS）的设计，开发和优化。 温度传感器基于结构在被加热时的热机械响应，使得其热膨胀不同于下面的衬底。 由于只需要光学访问来进行测量，因此这种温度传感方案可以用于恶劣的环境中，例如高温，其中不再可以获得电信号。 此外，这些微传感器将用于研究微尺度能量传输的基本问题，例如小尺度下的对流和辐射量。 该研究计划将培养学生在制造和表征技能所需的微型和纳米技术行业，其结果将广泛传播给科学界和公众。 该奖项由化学和运输系统部门的热运输和热处理计划资助。