RUI: Formulation for Coupled Composition-Thermoelectromechanics in Polycrystalline Thin Film Structures
RUI:多晶薄膜结构中耦合组合热机电的配方
基本信息
- 批准号:0301779
- 负责人:
- 金额:$ 14.64万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:2003
- 资助国家:美国
- 起止时间:2003-05-01 至 2006-04-30
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
RUI: Formulation for Coupled Composition-Thermoelectromechanics inPolycrystalline Thin Film StructuresLori C. BassmanThe thin film metal lines that comprise microelectronic interconnectsexperience large variations in thermal conditions. Duringfabrication, processing steps at different temperatures result insignificant thermal stresses, and under operating conditions the heatgenerated through Joule heating subjects the lines to elevatedtemperatures. The focus of this project is to incorporate the effectsof spatially varying temperature, along with electrical conduction,into a lattice-level model for the coupled composition and mechanicsof thin film polycrystalline materials. The ability to solve coupledcomposition, mechanics, electrical, and thermal problems on a generalpolycrystalline domain will provide opportunities for greaterunderstanding of the physical phenomena occurring in ever-smallerinterconnect structures. It also will enhance general capability tostudy these phenomena in a variety of crystalline materials relevantto the microelectronics industry. All facets of this project,including expansion of the formulation, implementation in a finiteelement code using specialized numerical methods, and validation ofthe model with experimental studies from the literature, are to becompleted with substantial participation of undergraduate students atHarvey Mudd College.
Ri:多晶薄膜结构中的组成-热电耦合公式Lori C.Bassman组成微电子互连的薄膜金属线在热条件下有很大的变化。在制造过程中,不同温度下的加工步骤会产生微不足道的热应力,在工作条件下,通过焦耳加热产生的热量会使管线承受较高的温度。该项目的重点是将空间温度变化的影响以及电导纳入到晶格级模型中,用于研究薄膜多晶材料的耦合组成和机理。在一般的多晶域上解决组合、力学、电气和热问题的能力将为更好地理解发生在越来越小的互连结构中的物理现象提供机会。它还将提高在与微电子工业相关的各种晶体材料中研究这些现象的一般能力。这个项目的所有方面,包括公式的扩展,使用专门的数值方法在有限元代码中实施,以及用文献中的实验研究验证模型,都将得到哈维马德学院本科生的大量参与。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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Lori Bassman其他文献
Assessing Mg–Sc–(rare earth) ternary phase stability via constituent binary cluster expansions
- DOI:
10.1016/j.commatsci.2022.111240 - 发表时间:
2022-05-01 - 期刊:
- 影响因子:
- 作者:
Anna Soper;Adam L. Shaw;Patrick L.J. Conway;Gregory S. Pomrehn;Michael Ferry;Lori Bassman;Aurora Pribram-Jones;Kevin J. Laws - 通讯作者:
Kevin J. Laws
Lori Bassman的其他文献
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{{ truncateString('Lori Bassman', 18)}}的其他基金
Collaborative Research: RUI: IRES - Track I: US-Australia collaboration on a new class of lead-free copper alloys to meet international health demands
合作研究:RUI:IRES - 第一轨道:美国与澳大利亚合作开发新型无铅铜合金,以满足国际健康需求
- 批准号:
2106617 - 财政年份:2021
- 资助金额:
$ 14.64万 - 项目类别:
Standard Grant
IRES: US-Australia Collaboration on New High Strength, High Ductility Classes of High Entropy Alloys through Intermetallic Manipulation
IRES:美国-澳大利亚通过金属间化合物处理合作开发新型高强度、高延展性高熵合金
- 批准号:
1559403 - 财政年份:2016
- 资助金额:
$ 14.64万 - 项目类别:
Standard Grant
IRES: US-Australia Collaboration on a Fundamental Approach to Generating New Classes of Lightweight, High Performance,High Entropy Alloys
IRES:美国-澳大利亚合作开发新型轻质、高性能、高熵合金的基本方法
- 批准号:
1261525 - 财政年份:2013
- 资助金额:
$ 14.64万 - 项目类别:
Standard Grant
Materials World Network/Research in Undergraduate Institutions: The True Three-Dimensional Nature of Aligned Dislocation Boundaries in Deformed Metals
材料世界网络/本科院校研究:变形金属中对齐位错边界的真实三维性质
- 批准号:
0807240 - 财政年份:2008
- 资助金额:
$ 14.64万 - 项目类别:
Continuing Grant
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