Adaption, Implementation & Enhancement of Multidisciplinary MEMS Curriculum for Undergraduate Electrical, Mechanical & Microelectronics Engineering Students

电气(55)-本项目调整和加强了在安娜堡大学和加州大学伯克利分校成功开发的微机电系统（MEMS）课程的课程内容和相应的实验室。微机电系统的基础和应用正在涵盖在一个新的介绍多学科“微机电系统设计”课程（随附微机电系统CAD模块实验室）。本课程是为学生准备两门课程-“MEMS制造”和“MEMS系统评估”-与MEMS CAD和制造模块实验室。这些MEMS实验室是在现有的罗切斯特理工学院（RIT）微系统制造设施中进行的。“MEMS制造”和“MEMS系统评估”课程改编和增强了安娜堡大学“MEMS导论”和“集成微系统实验室”课程。这些资源包括课堂笔记、各种实验、CAD工具、手册、专题以及其他课程资料和教学工具，以达到我们的教育目标。一套风格连贯和教学一致的课程正在为电气、机械和微电子（MicroE）工程本科学生开发，具有明确的材料、主题和课程顺序。具体来说，课程和模块化的MEMS课程结构将MEMS整合到MEMS基本概念的教学中，从入门级开始，发展到复杂MEMS并行设计和制造的高级主题。课程讲座和实验室正在开发用于互动课堂环境，实施互动学习策略和课堂实践。目前正在设计一系列评价技术，以评估与传统的以讲座为基础的课程相比的教学目标。材料的等级测试和评估将在六个季度内进行。除了掌握MEMS之外，实验室和项目任务也在提高学生的沟通、团队合作和项目管理能力，从而培养终身学习的技能。通过高级课题（抽象MEMS合成、CAD等）和综合实验室实验（制造、集成、封装和测试）来评估以学生为中心和引导的探索方法的有效性。作为我们传播工作的一部分，我们建立了一个互动网站，概述了MEMS课程，并允许免费下载所有课程材料。普渡大学、圣母大学和其他大学都表示有兴趣实施RIT MEMS课程。开发的课程由安娜堡大学、普渡大学和圣母大学的教师进行评估。该项目的广泛影响体现在先进的MEMS理论和工程实践中，这些理论和实践在强调教学、培训、学习和奖学金的教育中得到推广。此外，通过多学科本科研究和教育，妇女和少数民族广泛参与新的MEMS课程。最后，RIT共享用户微系统设施的维护和增强对MEMS社区产生了影响。

Electrical Electrical (55)-This project is adapting and enhancing the course contents and accompanying laboratories of successful micro-electromechanical systems (MEMS) curricula developed at UM Ann Arbor and UC Berkeley. MEMS fundamentals and applications are being covered in a new introductory multidisciplinary "MEMS Design" course (with accompanying MEMS CAD Module Laboratories). This course is preparing students for a sequence of two courses - "MEMS Fabrication" and "MEMS System Evaluation"-with MEMS CAD and Fabrication Module Laboratories. These MEMS laboratories are being performed in the existing Rochester Institute of Technology (RIT) Microsystems Fabrication Facilities. The "MEMS Fabrication" and "MEMS System Evaluation" courses are adapted and enhanced versions of UM Ann Arbor "Introduction to MEMS" and "Integrated Microsystems Laboratory" courses. The resources to be adapted include class notes, various laboratory experiments, CAD tools, manuals, projects as well as other course materials and teaching tools to attain our educational objectives. A set of stylistically coherent and pedagogically consistent courses is being developed for undergraduate Electrical, Mechanical and Microelectronics (MicroE) engineering students in a well-defined material, topics and courses sequence. Specifically, the courses and modular MEMS curriculum structure integrate MEMS into the teaching of the basic concepts of MEMS, starting from an introductory level and progressing to advanced topics in concurrent design and fabrication of complex MEMS. The course lectures and laboratories are being developed for use in an interactive classroom environment, implementing interactive learning strategies and classroom practices. A series of evaluative techniques are being designed to assess pedagogical objectives compared with the traditional lecture-based courses. Class testing and evaluation of materials are being conducted over six quarters. In addition to the mastery of MEMS, the laboratory and project assignments are improving student competencies in communication, teamwork and project management, thereby developing skills for lifelong learning. The effectiveness of student-centered and guided exploration methods is being assessed through advanced topics (abstract MEMS synthesis, CAD, etc.) and through comprehensive laboratory experiments (fabrication, integration, packaging and testing). As a part of our dissemination efforts, an interactive web site summarizing the MEMS curriculum and allowing free downloading of all course materials is be developed and effectively maintained. Purdue University, Notre Dame and other universities have expressed interest in implementing the RIT MEMS curriculum. The developed curriculum is being evaluated by UM Ann Arbor, Purdue University and Notre Dame faculty. Broader Impacts of the project are demonstrated in the advance MEMS theory and engineering practice that are promoted in education emphasizing teaching, training, learning and scholarship. Also, there is broad participation of women and minorities in the new MEMS curriculum through multidisciplinary undergraduate research and education. Finally, the maintaining and enhancement of the shared user Microsystems Facilities at RIT provide an impact on the MEMS community.