SBIR Phase I: Microscale Interferometric Sensor for High Speed MEMS Metrology

SBIR 第一阶段：用于高速 MEMS 计量的微型干涉传感器

• 批准号: 0319184
• 负责人: Thomas Kurfess
• 金额: $ 8.73万
• 依托单位: MEMScan, Incorporated
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2004-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319184&HistoricalAwards=false
• 关键词: SBIR; Phase; Microscale; Interferometric; Sensor

This SBIR Phase I project investigate the scientific and technical feasibility of an innovative micromachined optical interferometer as a quality control tool for MEMS production. One of the barriers to the growth of MEMS both as an enabling technology and as a new market is quality control. Quality control not only provides quality assurance but also it provides feedback to optimize the design, fabrication and assembly processes involved. The proposed microscale position sensing grating interferometer (uPSGI) with electrostatically actuated grating is itself microfabricated and integrated with optoelectronics. It measures the displacement of MEMS with high resolution (sub-nm) and bandwidth ( MHz). In this project, a uPSGI with movable grating will be fabricated and integrated into a microscope objective. The performance of the interferometric will be tested on dynamic MEMS devices and the feasibility of parallel array operation will be evaluated. The proposed technology converts the large-scale interferometric metrology system to a miniature sensor using a patented technology. It can be tailored for specific needs of MEMS manufacturers to reduce manufacturing costs, lead-time and waste of material and to increase product reliability. Potential customers include all the MEMS manufacturing companies.

这个SBIR一期项目研究了一种创新的微机械光学干涉仪作为MEMS生产质量控制工具的科学和技术可行性。作为一种使能技术和新市场，MEMS增长的障碍之一是质量控制。质量控制不仅提供质量保证，而且还提供反馈，以优化所涉及的设计，制造和装配过程。所提出的微尺度位置传感光栅干涉仪（uPSGI）采用静电驱动光栅，其本身是微型化的，并与光电子技术相结合。它以高分辨率（亚纳米）和带宽（MHz）测量MEMS的位移。在这个项目中，将制作一个带有可移动光栅的uPSGI，并将其集成到显微镜物镜中。将在动态MEMS器件上测试干涉测量的性能，并评估并行阵列操作的可行性。该技术利用专利技术将大型干涉测量系统转化为微型传感器。它可以针对MEMS制造商的特定需求进行定制，以降低制造成本，交货时间和材料浪费，并提高产品可靠性。潜在客户包括所有MEMS制造公司。