DYNAMIC IN-SITU STICTION AND FRICTION CHARACTERIZATION OF A MEMS

MEMS 的动态原位静摩擦和摩擦特性

• 批准号: 0326218
• 负责人: Tim Dallas
• 金额: $ 27万
• 依托单位: Texas Tech University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0326218&HistoricalAwards=false
• 关键词: DYNAMIC; SITU; STICTION; FRICTION; CHARACTERIZATION

We propose to use a commercial Microelectromechanical System (MEMS) to develop a detailed understanding of stiction and friction parameters as a function of surface coating and environmental conditions.Intellectual MeritUnder this project, we will develop an environmental control system that will allow various conditions (humidity, temperature, coatings, etc) to be altered in a packaged commercial MEMS [Texas Instrument's Digital Micromirror Display (DMD). The DMD, an array of ~ 1 million individually controllable digital micromirrors, provides a stable and well-characterized platform for making measurements with statistical significance.In addition to the in-situ characterization, we will carry out standard surface characterization using contact angle, atomic force microscopy (AFM), and scanning electron microscopy (SEM). Contact angle measurements will be used to determine the surface energy of the anti-stiction and anti-friction coatings applied to test substrates. The AFM and SEM will be used to image any damage to the coatings and underlying surface caused by wear.Broader ImpactThrough this project, we will expand synergistic ties to TI's Digital Light Products group, the makers of the DMD. This interaction will be expanded by providing Ph.D. students the opportunity to interact with a corporate research group, through shared research on a state-of-the-art MEMS. TI will provide DMDs, the controller boards needed to actuate the mirrors, and internship opportunities.

我们建议使用商用微机电系统 (MEMS) 来详细了解粘滞和摩擦参数作为表面涂层和环境条件的函数。智力优势在该项目下，我们将开发一种环境控制系统，允许在封装的商用 MEMS [德州仪器的数字微镜显示器 (DMD)] 中改变各种条件（湿度、温度、涂层等）。 DMD 是由约 100 万个独立可控数字微镜组成的阵列，为进行具有统计意义的测量提供了一个稳定且特征良好的平台。除了原位表征之外，我们还将使用接触角、原子力显微镜 (AFM) 和扫描电子显微镜 (SEM) 进行标准表面表征。接触角测量将用于确定应用于测试基材的抗粘连和减摩涂层的表面能。 AFM 和 SEM 将用于对磨损造成的涂层和底层表面的任何损坏进行成像。更广泛的影响通过该项目，我们将扩大与 DMD 制造商 TI 数字光产品组的协同关系。这种互动将通过提供博士学位来扩大。通过对最先进的 MEMS 的共同研究，学生有机会与企业研究小组互动。 TI 将提供 DMD、驱动镜子所需的控制器板以及实习机会。