DYNAMIC IN-SITU STICTION AND FRICTION CHARACTERIZATION OF A MEMS

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We propose to use a commercial Microelectromechanical System (MEMS) to develop a detailed understanding of stiction and friction parameters as a function of surface coating and environmental conditions.Intellectual MeritUnder this project, we will develop an environmental control system that will allow various conditions (humidity, temperature, coatings, etc) to be altered in a packaged commercial MEMS [Texas Instrument's Digital Micromirror Display (DMD). The DMD, an array of ~ 1 million individually controllable digital micromirrors, provides a stable and well-characterized platform for making measurements with statistical significance.In addition to the in-situ characterization, we will carry out standard surface characterization using contact angle, atomic force microscopy (AFM), and scanning electron microscopy (SEM). Contact angle measurements will be used to determine the surface energy of the anti-stiction and anti-friction coatings applied to test substrates. The AFM and SEM will be used to image any damage to the coatings and underlying surface caused by wear.Broader ImpactThrough this project, we will expand synergistic ties to TI's Digital Light Products group, the makers of the DMD. This interaction will be expanded by providing Ph.D. students the opportunity to interact with a corporate research group, through shared research on a state-of-the-art MEMS. TI will provide DMDs, the controller boards needed to actuate the mirrors, and internship opportunities.