The 18mm2 Laboratory

跨学科(99)这个项目正在开发一种创新能力，将使用微电子机械系统(MEMS)对微观和纳米尺度现象的详细研究添加到工程和物理的各种实验室环境中。这项工作的核心是开发一种低成本的MEMS教育芯片和控制器系统，可以通过标准的和广泛可用的实验室工具(显微镜和计算机)获得。芯片的使用允许许多教育水平和不同学科和班级的学生对重要的微米到纳米尺度的概念进行说明和实践。该项目的智力优势在于理论、计算机模拟、设计和片上实验之间的强交互作用。此外，MEMS设备包含了跨越许多工程和科学学科的概念，通常需要跨学科的研究和开发努力才能成功实施。随着微纳尺度系统继续成为主流设备，该项目产生了更广泛的影响，因为它能够支持新的实验室计划和教学模式，促进有利于培养为高科技职业和高级研究做好准备的本科生的环境。拥有用于测试和仿真的标准化MEMS芯片具有成本效益，并允许许多大学参与，允许更多的互动和MEMS教育界的进步。

Interdisciplinary (99) This project is developing an innovative capability to add the detailed study of micro- and nanoscale phenomena using Microelectromechanical Systems (MEMS) into a variety of laboratory settings in engineering and physics. The centerpiece of this effort is the development of a low-cost MEMS Education Chip and controller system accessible through standard and widely available laboratory tools (both microscope and computer). Use of the chip permits the illustration of, and hands-on engagement with, important micro- to nanoscale concepts for students at many educational levels and in various disciplines and classes. The intellectual merit of this project rests on strong interaction among theory, computer simulation, design, and on-chip experiments. In addition MEMS devices incorporate concepts that span many engineering and science disciplines and typically require interdisciplinary research and development efforts for successful implementation. As micro- and nanoscale systems continue to become mainstream devices, this project's broader impacts arise through its ability to support new laboratory programs and modes of teaching and learning that promote an environment conducive to producing undergraduate students who are well prepared for high-tech careers and advanced studies. Having a standardized MEMS chip for testing and simulation is cost effective and allows many universities to participate, allowing more interactions and advancement of the MEMS education community.