SBIR Phase I: PZT Multimorph MOEMS Deformable Mirror

这个小企业创新研究第一阶段项目提出了制造一个创新的多形态执行器。本论文将研究一种微镜驱动技术的可行性，该技术可以产生具有前所未有的性能的MEMS变形镜（DM）。传统的可变形反射镜存在速度不足、尺寸大以及缺乏集成控制电子器件的问题。一种新的致动器设计应该大大降低DM的功耗，这应该大大增加CMOS驱动电子器件的集成量。这种极低的电压应该允许将反射镜部分组装到亚微米电路上，该电路驱动反射镜并包括集成的高带宽位置反馈电路。这种独特的高力多形态致动器应该在许多基于现有致动技术的MEMS器件中找到用途。 这种微镜技术也应该适用于需要高速切换微镜的各种其他光学应用，例如在电信和显示技术中。

This Small Business Innovation Research Phase I project proposes to fabricate an innovative multi-morph actuator. The feasibility of a micro-mirror actuating technology that can produce a MEMS deformable mirror (DM) with unprecedented capabilities will be researched. Conventional deformable mirrors suffer from inadequate speed, large size, and lack of integrated control electronics. A new actuator design should drastically reduce the power consumption for a DM, which should increase greatly the amount of integration possible with CMOS drive electronics. This extremely low voltage should allow the mirror segments to be assembled onto sub-micron circuits, which drive the mirrors and include integrated high-bandwidth position-feedback circuits.This unique high-force multi-morph actuator should find use in a number of MEMS devices that are based on existing actuation technologies. This micro-mirror technology should also be suitable a variety of other optical applications requiring the high speed switching of micro-mirrors such as in telecommunications and in display technology.