SBIR Phase II: Lead Zirconate Titanate (PZT) Multimorph Micro-Opto-Electro-Mechanical Systems (MOEMS) Deformable Mirror

SBIR 第二期：锆钛酸铅 (PZT) 多晶型微光机电系统 (MOEMS) 可变形镜

• 批准号: 0522321
• 负责人: Michael Helmbrecht
• 金额: --
• 依托单位: Iris AO, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-09-01 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0522321&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Lead; Zirconate

This Small Business Innovation Research (SBIR) Phase II research project aims to deliver a dramatic advance in microelectromechanical system (MEMS) deformable mirror performance. Deformable mirrors are the key active component in adaptive optics (AO) systems that provide vastly improved resolution through turbulent air, water, and biological samples. The lack of low- cost, high-deflection (stroke), and low-voltage deformable mirrors has prevented the widespread deployment of AO in a range of fields including biotechnology, ophthalmology, and national security. Phase I successfully demonstrated a new actuation approach for shaping MEMS deformable mirrors. The new approach combines piezoelectric actuation with MEMS deformable mirror technology. The piezoelectric actuators are a true breakthrough as deformable mirror actuation voltage may be reduced from 100-200 volts down to 10-20 volts - a full order of magnitude reduction. The use of smaller, less expensive, safer, and more reliable low-voltage electronics opens the door for a host of applications. The goal of Phase II is to build on the Phase 1 actuator designs to manufacture complete deformable mirror arrays with groundbreaking high stroke, low voltage, low cost, high speed, coupled with superb optical quality. The high resolution and contrast enhancement enabled by adaptive optics (AO) using deformable mirrors is poised to dramatically advance astronomy, ophthalmology, biology, and national security. Yet for the full potential to be realized, miniature deformable mirrors with high stroke, low voltage, and low cost are critical. If successful the proposed mirror will address the key requirements vital for moving AO into mainstream scientific laboratories and commercial markets. This will have enormous social and commercial impact. Biological microscopes that have far higher resolution, ophthalmoscopes that can image single cells in a living retina, laser microsurgery with precise beam control, and telescopes that can image through atmospheric turbulence will push the boundaries of science. The health and well being of millions will be directly improved as commercialization moves early eye disease detection, customized vision correction, and new medical treatments into doctor offices across the nation. Free space optical communication, and long-range surveillance applications will also reap the benefits of this technology.

该小型企业创新研究（SBIR）第二阶段研究项目旨在实现微机电系统（MEMS）变形镜性能的显著进步。可变形镜是自适应光学（AO）系统中的关键有源部件，可通过湍流空气、水和生物样品提供极大改善的分辨率。缺乏低成本、高偏转（行程）和低电压的可变形反射镜已经阻止了AO在包括生物技术、眼科学和国家安全的一系列领域中的广泛部署。第一阶段成功地展示了一种新的驱动方法，形成MEMS变形镜。新方法将压电驱动与MEMS变形镜技术相结合。压电致动器是真正的突破，因为可变形反射镜致动电压可以从100-200伏降低到10-20伏-一个完整的数量级降低。使用更小、更便宜、更安全、更可靠的低压电子设备为许多应用打开了大门。第二阶段的目标是在第一阶段致动器设计的基础上，制造具有突破性的高行程、低电压、低成本、高速度以及卓越光学质量的完整可变形反射镜阵列。自适应光学（AO）利用可变形镜实现的高分辨率和对比度增强有望大大推进天文学，眼科学，生物学和国家安全。然而，为了实现全部潜力，具有高行程、低电压和低成本的微型可变形反射镜是至关重要的。如果成功的话，拟议的镜子将解决将AO推向主流科学实验室和商业市场的关键要求。这将产生巨大的社会和商业影响。具有更高分辨率的生物显微镜，可以对活体视网膜中的单个细胞成像的检眼镜，具有精确光束控制的激光显微手术，以及可以通过大气湍流成像的望远镜将推动科学的边界。随着商业化将早期眼科疾病检测、定制视力矫正和新的医疗方法引入全国各地的医生办公室，数百万人的健康和福祉将得到直接改善。自由空间光通信和远程监控应用也将受益于这项技术。