GOALI: 3D Nanomanufacturing with Rubber Stamps and Conformable Phase Masks

GOALI：使用橡胶印章和适形相位掩模进行 3D 纳米制造

• 批准号: 0355532
• 负责人: John Rogers
• 金额: $ 38万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0355532&HistoricalAwards=false
• 关键词: GOALI; 3D; Nanomanufacturing; Rubber; Stamps

This proposed research will directly address a critical need for nanoscience and technology: broadly useful techniques that have the ability to fabricate complex, well defined three dimensional (3D) nanostructures. Two new methods are proposed here. The first uses single or multilayer transfer of thin solid 'ink' coatings from high resolution rubber stamps onto substrates. The second uses these stamps as conformable phase masks for proximity field nanopatterning of thin layers of transparent photopolymers. Although both techniques use the same pattern transfer elements, they rely on completely different physical principles, and they provide complementary patterning capabilities. The operational simplicity of the techniques, their ability to pattern large areas quickly, and the flexibility in the geometry of structures that can be formed with them suggest general utility for 3D nanomanufacturing. The scientific thrusts of the program involve: 1) Surface chemistries that can be used to transfer thin solid 'inks' from high resolution rubber stamps to target substrates, and materials for these inks. The aspects that will be investigated, such as surface chemical structure and bonding density required for transfer and physical toughness in ultrathin multilayer assemblies, will enable multilayer and 3D transfer printing. These studies will also provide insights into the molecular-level aspects of adhesion and fracture. 2) Near, proximity and far field optics of high resolution conformable phase masks. Modeling and experimental work will explore the ability to manipulate the 3D flow of light by using masking elements that modulate the optical phase. In addition to their central role in the proximity field nanopatterning approach, these studies will have relevance to conventional photomask design and near field optical imaging and detection. 3) Structure-property relationships in elastomeric polymers that provide high modulus, high physical toughness and high index of refraction. This work will yield materials for robust, reliable stamps and masks for the 3D nanomanufacturing techniques described above. It will also establish general strategies for polymer modification based on (i) bimodal segments, (ii) blends with highly crosslinked network resins domains and (iii) phase separated nanoparticles.The science and methods that emerge from the research will be disseminated widely though conference talks, papers and materials posted on a central website, where they can be accessed and downloaded by any interested parties. Furthermore, the GOALI partner, Dow Corning Corporation, will provide expertise in new materials and processing methods, thus ensuring broad technology transfer of successful efforts and excellent educational and outreach opportunities for the students. A hands-on summer laboratory course on nanofabrication will be developed to introduce this important area to students from a wide range of disciplines. It will also expose these fields to underrepresented undergraduate students from Clark Atlanta University, an historically black institution, who will actively participate in this summer course and the research.

这项拟议的研究将直接解决对纳米科学和技术的迫切需求：具有制造复杂、定义良好的三维(3D)纳米结构的能力的广泛有用的技术。这里提出了两种新的方法。第一种是使用单层或多层将薄薄的固体‘油墨’涂层从高分辨率橡皮图章转移到基材上。第二种是使用这些印章作为可整合的相位掩模，用于透明光聚合物薄层的近场纳米刻蚀。虽然这两种技术使用相同的图案转移元件，但它们依赖于完全不同的物理原理，并且它们提供互补的图案化能力。这些技术操作简单，能够快速形成大片区域的图案，以及可以用它们形成的结构几何形状的灵活性，这表明3D纳米制造具有普遍的实用性。该计划的科学推动力包括：1)表面化学，可用于将薄薄的固体‘油墨’从高分辨率橡皮图章转移到目标基材，以及这些油墨的材料。将研究的方面，如超薄多层组件中转移所需的表面化学结构和结合密度以及物理韧性，将使多层和3D转移打印成为可能。这些研究还将提供对粘连和骨折的分子水平方面的见解。2)高分辨率一致位相掩模的近场、近场和远场光学。建模和实验工作将探索通过使用调制光学相位的掩蔽元件来操纵3D光流的能力。除了它们在近场纳米刻蚀方法中的核心作用外，这些研究还将与传统的光掩模设计和近场光学成像和检测相关。3)提供高模数、高物理韧性和高折射率的弹性聚合物的结构-性能关系。这项工作将产生用于上述3D纳米制造技术的坚固、可靠的印章和掩膜的材料。它还将建立基于(I)双峰链段、(Ii)与高度交联的网络树脂结构域的共混和(Iii)相分离纳米粒子的聚合物改性的一般战略。研究产生的科学和方法将通过在中央网站上张贴的会议演讲、论文和材料广泛传播，任何感兴趣的各方都可以在那里访问和下载它们。此外，Goali合作伙伴道康宁公司将提供新材料和加工方法方面的专业知识，从而确保广泛的技术转让，为学生提供成功的努力和良好的教育和推广机会。将开发一门关于纳米制造的暑期动手实验室课程，向来自不同学科的学生介绍这一重要领域。它还将把这些领域暴露给克拉克亚特兰大大学的本科生，他们将积极参与这个暑期课程和研究。克拉克亚特兰大大学是一所历史悠久的黑人院校。