SNM: Scalable 3D Nanomanufacturing Combining Ultrafast Laser Processing and Directed Self-Assembly

纳米材料和纳米技术为制造新颖架构和增强性能的设备提供了独特的机会，并且可以克服系统集成问题，这些问题挑战了当前适合平面几何形状并仅限于自上而下架构的纳米制造方法。该可扩展纳米制造（SNM）项目的核心动机是开发一种新的制造范例，该范例提供可扩展性和灵活性，从而能够在大面积和任意密度的真正三维架构中制造和集成纳米级器件。将开发一个强大的、经过充分验证和可扩展的平台，用于构建具有前所未有的灵敏度和功能的纳米系统。该研究将对教育以及变革性和可持续纳米制造技术的发展产生影响，同时拓宽我们对基础科学的理解。应用包括先进光学材料、高灵敏度传感器和用于组织工程的纳米材料。因此，该研究将有益于美国工业、经济和社会。该项目将为研究生和本科生，特别是代表性不足的少数群体提供新的机会，让他们获得纳米科学和工程方面的研究经验和最先进的培训。将开发有关纳米制造和材料加工的研讨会课程，并将广播纳米制造的在线课程节目。将实施一系列针对当地高中生和社区大学转学生的外展活动。核心研究策略利用超快激光束加工来生成特征分辨率低于 50 nm 的支架多尺度结构。双光子聚合将用于制造对压力、光、热和电刺激敏感的可调特性结构。该技术与超快激光微/纳米加工一起适用于多光束配置，以提高加工吞吐量。一旦模板构建完成，嵌段共聚物的定向自组装将用于生产具有定制功能的三维材料，其中图案放大将用于将长度尺度推至10纳米以下。嵌段共聚物的定向自组装是一个并行过程，因此，特别是在这些研究中关注的基本长度尺度上，速度相当快。 直接激光写入将用于创建具有所需结构特性的结构，包括光波导、流体通道和导电电路。将演示以下功能结构示例：i）高灵敏度三维多重传感器装置，ii）大面积复杂三维超材料和iii）纳米结构组织支架。材料和化学品的影响、制造过程中能源和其他资源的消耗以及产品报废和回收将在可持续性分析中进行评估。

Nanomaterials and nanotechnology offer unique opportunities for fabricating devices of novel architecture and enhanced performance and can overcome system integration issues challenging current nanomanufacturing methods that are suited to planar geometries and are confined to top-down architectures. The central motivation of this Scalable NanoManufacturing (SNM) project is to develop a new manufacturing paradigm that offers scalability and flexibility enabling nanoscale device fabrication and integration in truly three-dimensional architectures over large areas and with arbitrary densities. A robust, fully proven and scalable platform for building nanosystems of unprecedented sensitivity and functionality will be developed. The research will have an impact on education and the development of transformational and sustainable nanomanufacturing technology while broadening our understanding of the fundamental science. Applications include advanced optical materials, high sensitivity sensors and nanomaterials for tissue engineering. Therefore, the research will benefit the United States industry, economy and society. The project will provide new opportunities for graduate and undergraduate students and in particular underrepresented minorities to have research experiences and state-of-the-art training in nanoscience and engineering. Seminar courses on nanomanufacturing and materials processing will be developed and an on line course program in nanomanufacturing will be broadcast. A set of outreach activities aiming at local high school students and transfer students from community colleges will be implemented.The core research strategy takes advantage of ultrafast laser beam processing for generating the scaffold multi-scale structures with sub-50 nm feature resolution. Two-photon polymerization will be used to fabricate structures of tunable properties that are sensitive to pressure, light, heat and electrical stimulation. This technique, together with ultrafast laser micro/nanomachining will be adapted to multiple beam configurations in order to increase the processing throughput. Once the template is constructed, the directed self-assembly of block copolymers will be used to produce three-dimensional materials with tailored functionality where pattern amplification will be used to push the length scale to the sub-10 nm regime. The directed self-assembly of block copolymers is a parallel process and, as such, particularly over the fundamental length scales of concern in these studies, is quite rapid. Direct laser writing will be used to create structures of the desired structural properties, including optical waveguides, fluidic channels and conductive circuitry. The following examples of functional structures will be demonstrated: i) highly sensitive three-dimensional multi-plexed sensor devices, ii) large area complex three-dimensional metamaterials and iii) nanostructured tissue scaffolds. The impact of materials and chemicals, consumption of energy and other resources during manufacturing, as well as product end-of-life and recycling will be evaluated in a sustainability analysis.