SNM: Scalable 3D Nanomanufacturing Combining Ultrafast Laser Processing and Directed Self-Assembly

纳米材料和纳米技术为制造新型结构和增强性能的器件提供了独特的机会，并且可以克服当前纳米制造方法所面临的系统集成问题，这些方法适用于平面几何形状，并且仅限于自上而下的结构。这个可扩展纳米制造（SNM）项目的核心动机是开发一种新的制造范式，提供可扩展性和灵活性，使纳米级器件的制造和集成在真正的三维结构中，覆盖大面积和任意密度。将开发一个强大的、完全成熟的、可扩展的平台，用于构建具有前所未有的灵敏度和功能的纳米系统。这项研究将对教育和转型和可持续纳米制造技术的发展产生影响，同时拓宽我们对基础科学的理解。应用包括先进的光学材料，高灵敏度传感器和组织工程的纳米材料。因此，这项研究将有利于美国的工业、经济和社会。该项目将为研究生和本科生，特别是代表性不足的少数民族提供新的机会，让他们获得纳米科学和工程方面的研究经验和最先进的培训。开设纳米制造与材料加工研修班，并播出纳米制造在线课程。将实施一系列针对本地高中生和社区大学转校生的外展活动。研究的核心策略是利用超快激光束加工技术生成特征分辨率低于50 nm的支架多尺度结构。双光子聚合将用于制造对压力、光、热和电刺激敏感的可调性质的结构。该技术将与超快激光微/纳米加工一起适应多光束配置，以提高加工吞吐量。一旦模板构建完成，嵌段共聚物的定向自组装将用于生产具有定制功能的三维材料，其中模式放大将用于将长度范围推至10纳米以下。嵌段共聚物的定向自组装是一个平行的过程，因此，特别是在这些研究中所关注的基本长度尺度上，是相当迅速的。直接激光书写将用于创建所需结构特性的结构，包括光波导、流体通道和导电电路。以下功能结构的例子将被展示：i)高灵敏度的三维多路复用传感器装置，ii)大面积复杂的三维超材料和iii)纳米结构组织支架。材料和化学品的影响，制造过程中能源和其他资源的消耗，以及产品寿命结束和回收将在可持续性分析中进行评估。

Nanomaterials and nanotechnology offer unique opportunities for fabricating devices of novel architecture and enhanced performance and can overcome system integration issues challenging current nanomanufacturing methods that are suited to planar geometries and are confined to top-down architectures. The central motivation of this Scalable NanoManufacturing (SNM) project is to develop a new manufacturing paradigm that offers scalability and flexibility enabling nanoscale device fabrication and integration in truly three-dimensional architectures over large areas and with arbitrary densities. A robust, fully proven and scalable platform for building nanosystems of unprecedented sensitivity and functionality will be developed. The research will have an impact on education and the development of transformational and sustainable nanomanufacturing technology while broadening our understanding of the fundamental science. Applications include advanced optical materials, high sensitivity sensors and nanomaterials for tissue engineering. Therefore, the research will benefit the United States industry, economy and society. The project will provide new opportunities for graduate and undergraduate students and in particular underrepresented minorities to have research experiences and state-of-the-art training in nanoscience and engineering. Seminar courses on nanomanufacturing and materials processing will be developed and an on line course program in nanomanufacturing will be broadcast. A set of outreach activities aiming at local high school students and transfer students from community colleges will be implemented.The core research strategy takes advantage of ultrafast laser beam processing for generating the scaffold multi-scale structures with sub-50 nm feature resolution. Two-photon polymerization will be used to fabricate structures of tunable properties that are sensitive to pressure, light, heat and electrical stimulation. This technique, together with ultrafast laser micro/nanomachining will be adapted to multiple beam configurations in order to increase the processing throughput. Once the template is constructed, the directed self-assembly of block copolymers will be used to produce three-dimensional materials with tailored functionality where pattern amplification will be used to push the length scale to the sub-10 nm regime. The directed self-assembly of block copolymers is a parallel process and, as such, particularly over the fundamental length scales of concern in these studies, is quite rapid. Direct laser writing will be used to create structures of the desired structural properties, including optical waveguides, fluidic channels and conductive circuitry. The following examples of functional structures will be demonstrated: i) highly sensitive three-dimensional multi-plexed sensor devices, ii) large area complex three-dimensional metamaterials and iii) nanostructured tissue scaffolds. The impact of materials and chemicals, consumption of energy and other resources during manufacturing, as well as product end-of-life and recycling will be evaluated in a sustainability analysis.