UHV Studies of Metals Dry-Etching with Beta-Diketones

本项目研究β -二酮在铜、氧化铝、镍铁和钨表面的蚀刻和分解反应途径。用-二酮蚀刻金属与金属层去除和电子工业的晶圆和腔室清洁有关，以及其他潜在的应用，如团聚的再分散，无活性催化剂颗粒。一些-二酮比目前使用的卤化腐蚀剂对环境更友好。此外，使用比当前工艺更低的温度和压力，这减少了微电子层之间的迁移和扩散。铜用于半导体集成电路和磁记录磁头，在这些产品的制造过程中，铜必须进行蚀刻和沉积。有人提出，当六氟戊二酮在铜上分解时，会形成有害的聚合物；了解聚合物的形成机制也是这个项目的一部分，这样就可以避免或最小化聚合物的形成。利用俄歇电子能谱、程序升温解吸能谱和反射/吸收红外能谱来确定聚合物的键合和组成，研究聚合物的结构和形成机理。该项目致力于与具有技术相关性的电子/光子材料相关的基础研究问题。对蚀刻工艺的基本理解和技术进步对电子学/光子学和环境都是有益的。该项目有效地整合了研究和教育，并为材料科学领域的研究生和本科生的培训创造了机会，这些领域对训练有素的劳动力有既定的需求。学生培训的一部分将是参加材料研究小组（MRG），这是一个跨学科小组，允许研究生展示他们的工作，并向其他教授通报其他部门正在进行的研究。他是来自化学工程、化学与生物化学、机械工程、物理与工程物理四个系的七名教授之一。这个小组的一个目标是鼓励教授之间的合作。材料研究小组通过让学生接触其他学科的研究，并为他们提供练习公开演讲的机会，共同致力于基础广泛的跨学科教育和培训

This project addresses etching and decomposition reaction pathways of beta-diketones on copper, aluminum oxide, NiFe, and tungsten surfaces. Etching metals with beta-diketones is relevant to metal layer removal and for wafer and chamber cleaning in the electronics industry, as well as other potential applications such as redispersion of agglomerated, inactive catalyst particles. Some of the beta-diketones are friendlier to the environment than currently used halogenated etchants. Additionally, lower temperatures and pressures than in current processes are used, which decreases migration and diffusion between microelectronics layers. Copper is used in semiconductor integrated circuits and in magnetic recording heads, and copper must be etched as well as deposited in the fabrication of these products. It has been proposed that a detrimental polymer forms when hexafluoropentanedione decomposes on copper; understanding the polymer formation mechanism is also part of this project, so that it can be avoided or minimized. The polymer structure and formation mechanism will be studied using Auger electron spectroscopy, temperature-programmed desorption spectroscopy, and reflection/absorption infrared spectroscopy to determine the polymer bonding and composition. %%% The project addresses fundamental research issues associated with electronic/photonic materials having technological relevance. Basic understanding and technological advances in etching processes are beneficial to electronics/photonics, and to the environment. The project effectively integrates research and education, and creates an opportunity for the training of graduate and undergraduate students in materials science areas where there is an established need for a highly trained workforce. Part of the students' training will be participation in a Materials Research Group (MRG), an interdisciplinary group formed to allow graduate students to present their work and to inform other professors of research going on in other departments. The PI is one of seven professors from four participating departments: Chemical Engineering, Chemistry and Biochemistry, Mechanical Engineering, and Physics and Engineering Physics. A goal of the group is to encourage collaboration between the professors. The Materials Research Group collectively works toward broad based, interdisciplinary education and training by exposing students to other disciplinary research and by providing them the opportunity to practice public speaking.***