Acquisition of an Ultra-high Vacuum Chamber for Etching Studies and Student Training
Acquisition of an Ultra-high Vacuum Chamber for Etching Studies and Student Training
批准号:
0216840
负责人:
Laura Ford
金额:
$14.0万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
2002
资助国家:
美国
项目状态:
已结题
起止时间:
2002-09-01 至 2004-08-31
中文摘要
这笔拨款支持购买由涡轮分子阻力泵泵送的超高真空(UHV)室。该室将有一台质谱仪、一台俄歇电子光谱仪和一台用于分析设备的反射/吸收红外光谱仪。该室还将配备离子计、离子枪和xyzq样品操纵器。该实验室目前无法使用特高压室。没有特高压室,研究人员只能在低真空反应器中观察最终产物及其形成动力学。特高压室可以确定在表面形成的中间物质,这反过来又导致对反应的更全面的理解。这对于研究b-二酮在不同表面上的反应途径是必要的。随着对反应的深入了解,研究人员可以开发出用b-二酮清洁蚀刻镍/铁合金、氧化铝和钨等表面的方法。这个特高压室将允许研究生和本科生在特高压技术方面进行培训,并将为特高压表面科学的学生提供新的机会。该项目将极大地加强塔尔萨大学表面科学学生的培训。
英文摘要
This grant supports the purchase of an ultra-high vacuum (UHV) chamber pumped by a turbomolecular drag pump. The chamber will have a mass spectrometer, an Auger electron spectrometer, and a reflection/absorption infrared spectrometer for analytical equipment. The chamber will also have an ion gauge, an ion gun, and a xyzq sample manipulator. The laboratory currently does not have access to a UHV chamber. Without a UHV chamber, the investigators can only observe the end products and the kinetics of their formation in a low-vacuum reactor. A UHV chamber allows determination of what intermediate species form on the surface, which in, turn, leads to a fuller understanding of the reactions. This is necessary for research to determine reaction pathways of b-diketones on various surfaces. With a deeper understanding of the reactions, the investigators can develop methods of cleanly etching surfaces such as nickel/iron alloys, alumina, and tungsten with b-diketones. This UHV chamber will permit the training of graduate and undergraduate students in UHV techniques and will provide new opportunities for students in UHV surface science. This project will greatly enhance the training of students in surface science at the University of Tulsa.
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依托单位:
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