Acquisition of an Ultra-high Vacuum Chamber for Etching Studies and Student Training

购买超高真空室用于蚀刻研究和学生培训

• 批准号: 0216840
• 负责人: Laura Ford
• 金额: $ 14万
• 依托单位: University of Tulsa
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-09-01 至 2004-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0216840&HistoricalAwards=false
• 关键词: Acquisition; Ultra; Vacuum; Chamber; Etching

This grant supports the purchase of an ultra-high vacuum (UHV) chamber pumped by a turbomolecular drag pump. The chamber will have a mass spectrometer, an Auger electron spectrometer, and a reflection/absorption infrared spectrometer for analytical equipment. The chamber will also have an ion gauge, an ion gun, and a xyzq sample manipulator. The laboratory currently does not have access to a UHV chamber. Without a UHV chamber, the investigators can only observe the end products and the kinetics of their formation in a low-vacuum reactor. A UHV chamber allows determination of what intermediate species form on the surface, which in, turn, leads to a fuller understanding of the reactions. This is necessary for research to determine reaction pathways of b-diketones on various surfaces. With a deeper understanding of the reactions, the investigators can develop methods of cleanly etching surfaces such as nickel/iron alloys, alumina, and tungsten with b-diketones. This UHV chamber will permit the training of graduate and undergraduate students in UHV techniques and will provide new opportunities for students in UHV surface science. This project will greatly enhance the training of students in surface science at the University of Tulsa.

这笔赠款支持购买一个超高真空（UHV）室抽气分子拖曳泵。该室将配备质谱仪、俄歇电子光谱仪和反射/吸收红外光谱仪作为分析设备。该室还将有一个离子计，离子枪，和xyzq样品操纵器。该实验室目前无法使用特高压室。由于没有超高真空室，研究人员只能在低真空反应堆中观察最终产物及其形成动力学。超高真空室可以确定表面上形成的中间物质，这反过来又可以更全面地了解反应。这对于确定b-二酮在各种表面上的反应途径的研究是必要的。随着对反应的深入了解，研究人员可以开发出清洁蚀刻表面的方法，如镍/铁合金，氧化铝和钨与b-二酮。这个特高压室将允许研究生和本科生在特高压技术的培训，并将提供新的机会，为学生在特高压表面科学。该项目将大大加强塔尔萨大学表面科学专业学生的培训。