Undergraduate Microfabrication Laboratory

本科微细加工实验室

• 批准号: 0411200
• 负责人: Todd Kaiser
• 金额: $ 16.09万
• 依托单位: Montana State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2007-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0411200&HistoricalAwards=false
• 关键词: Undergraduate; Microfabrication; Laboratory

Engineering - Electrical (55)The project adapts and implements microfabrication techniques from successful programs at Georgia Institute of Technology and Virginia Polytechnic Institute as it develops two undergraduate laboratory intensive courses. The first course introduces students to microfabrication techniques where they learn clean room operations and safety procedures and ultimately produce and test a MOS transistor. The second course presents more complex fabrication techniques that lead to the production of a simple microelectromechanical component (i.e., a MEMS device). An evaluation panel made up of faculty members, who have developed similar laboratories and courses, is assessing the program. The panel is examining student course evaluations, course content, and student work. The PIs plan to report the results of the development and evaluation efforts in journal and conference publications and to develop a web-based microfabrication reference tutorial.

工程-电气（55）该项目适应并实施了格鲁吉亚理工学院和弗吉尼亚理工学院的成功项目的微细加工技术，因为它开发了两个本科实验室强化课程。第一门课程向学生介绍了微制造技术，他们学习洁净室操作和安全程序，并最终生产和测试MOS晶体管。第二门课程介绍了更复杂的制造技术，导致生产一个简单的微机电组件（即，MEMS器件）。 一个由开发了类似实验室和课程的教职员工组成的评估小组正在评估该项目。该小组正在检查学生的课程评估，课程内容和学生的工作。PI计划在期刊和会议出版物中报告开发和评估工作的结果，并开发基于网络的微加工参考教程。