SBIR Phase I: MEMS Mirror Arrays for Bioimaging Applications

SBIR 第一阶段：用于生物成像应用的 MEMS 镜阵列

• 批准号: 0419999
• 负责人: Tom Tsao
• 金额: $ 10万
• 依托单位: Umachines, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-07-01 至 2005-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0419999&HistoricalAwards=false
• 关键词: SBIR; Phase; MEMS; Mirror; Arrays

This Small Business Innovation Research (SBIR) Phase I research project will demonstrate the feasibility of manufacturing large-throw, optically flat, high resolution and fast response-speed deformable mirrors (DM). The DM is a critical component in adaptive optics, which can be applied to improve medical imaging technology. The device consists of Segmented Membrane Arrays (SMA) and bottom electrodes with Backside Solder Bump (BSB) fabricated by micromachining technology. The design will use arrays of mirror pixels to eliminate the cross talk between adjacent elements. The mirror pixels will be made of stress-free single crystalline silicon (SCS) to ensure optically flat surfaces. The commercial application of this project will be in a number of areas, including bio imaging instruments, telescope systems, 3D data storage systems and free-space optical communications.

这个小型企业创新研究（SBIR）第一阶段研究项目将证明制造大行程，光学平坦，高分辨率和快速响应速度的变形镜（DM）的可行性。自适应光学是自适应光学的重要组成部分，可用于提高医学成像技术。该器件由分段薄膜阵列（SMA）和底部电极与背面焊料凸点（BSB）的微机械加工技术制造。该设计将使用镜面像素阵列来消除相邻元件之间的串扰。反射镜像素将由无应力单晶硅（SCS）制成，以确保光学平面。该项目的商业应用将在多个领域，包括生物成像仪器、望远镜系统、三维数据存储系统和自由空间光通信。