Collaborative Research: Micro - Lenses for Manufacturing

合作研究：用于制造的微透镜

• 批准号: 0500311
• 负责人: Paul Steen
• 金额: --
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-04-15 至 2009-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0500311&HistoricalAwards=false
• 关键词: Collaborative; Research; Micro; Lenses; Manufacturing

The objective of this research is to develop the science base for tunable micro-lens arrays and explore their application for high throughput production. Tunable, millimeter-sized capillary lenses have recently been demonstrated by this group, with resolution approaching the maximum theoretical limit. The unique feature of these capillary lenses is that their tuning does not involve the movement of the contact line, where the fluids (the liquid that constitutes the lens and the gas surrounding it) meet the solid; contact line movement is avoided since it is a source of friction. The project will address two key issues: i) fast-response time and ii) small-scale packaging. The approach to meet the first challenge is to analyze shape changes in capillary lenses triggered via mechanical (pressure obtained by piezoelectric actuator) and electrical (electrokinetic) means. To address the second challenge, existing microfabrication techniques will be adapted and new ones developed for manufacturing capillary micro-lens arrays. For example, a novel technique may have to be developed to embed a porous medium in the middle of a glass chip for electrokinetic actuation. Micro-lens arrays will be studied at scales ranging from tens to hundreds of microns. The proposed research will ultimately make possible a technology to accurately control the minimum feature size by continuously adjusting the focal length of each micro-lens while the substrate is scanned underneath the array.This project is expected to impact technological development, since capillary micro-lenses can be used to manipulate light, enabling high volume production (manufacturing) of small scale devices. Specifically, realization of an individually tunable micro-lens array can lead to dynamic photolithography, which can be used for example on curved surfaces. This is a gateway to 3-dimensional patterning capability with sub-micrometer features. Furthermore, the multidisciplinary senior team is expected to provide a unique research opportunity for educating graduate and undergraduate students.

本研究的目的是发展可调微透镜阵列的科学基础，并探索其在高通量生产中的应用。可调的，毫米大小的毛细管透镜最近已经证明了这个小组，分辨率接近最大理论极限。这些毛细管透镜的独特之处在于其调谐不涉及接触线的移动，其中流体（构成透镜的液体和围绕它的气体）与固体相遇;避免接触线移动，因为它是摩擦的来源。该项目将解决两个关键问题：i）快速响应时间和ii）小规模包装。迎接第一个挑战的方法是分析通过机械（由压电致动器获得的压力）和电气（动电）手段触发的毛细管透镜的形状变化。为了解决第二个挑战，现有的微加工技术将被改编和新的开发用于制造毛细管微透镜阵列。例如，可能必须开发一种新技术，将多孔介质嵌入玻璃芯片的中间，用于电动致动。微透镜阵列将在几十到几百微米的尺度上进行研究。该研究将最终实现一种技术，通过在阵列下方扫描基板时连续调整每个微透镜的焦距，精确控制最小特征尺寸。该项目有望影响技术发展，因为毛细管微透镜可用于操纵光，从而实现小规模器件的大批量生产（制造）。具体地，可单独调谐的微透镜阵列的实现可以导致动态光刻，其可以例如在弯曲表面上使用。这是通向具有亚微米特征的三维图案化能力的途径。此外，多学科的高级团队预计将为教育研究生和本科生提供一个独特的研究机会。