SBIR Phase I: Laser Spectrometer for Semiconductor Yield Improvement

SBIR 第一阶段：用于提高半导体良率的激光光谱仪

• 批准号: 0509692
• 负责人: Jeffrey Pilgrim
• 金额: --
• 依托单位: VISTA PHOTONICS, INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-07-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0509692&HistoricalAwards=false
• 关键词: SBIR; Phase; Laser; Spectrometer; Semiconductor

This Small Business Innovation Research Phase I research project will determine the performance and operating specifications for a new laser spectrometer suitable for detection of trace moisture at semiconductor process tools. Trace moisture contamination has an adverse, costly, effect on semiconductor manufacturing yields. The sensor will be about the size of a can of soda and provide single digit parts-per-billion (ppb) sensitivity in a few seconds, 0.25 ppb in under a minute. The estimated price point with volume production will be a factor of four to five lower than present trace moisture sensors. The fully developed rugged prototypes will be suitable for detection of moisture in a variety of toxic, corrosive or inert process gases. The significantly improved price point will enable semiconductor manufacturers to deploy the sensors on each process tool throughout the manufacturing facility. If successful this project will reduce the cost of manufacturing microelectronic semiconductor chips. The basic technology shall extend to other trace gas detection applications including biomedical breath diagnosis. Additional applications abound in detection of trace environmental species important to health, occupational safety, and global warming. The performance and price point of the proposed sensor will enable widespread distribution to scientific researchers in various fields of discovery.

这个小型企业创新研究第一阶段的研究项目将确定一种新的激光光谱仪的性能和操作规范，适用于检测半导体工艺工具中的微量水分。微量水分污染对半导体制造产量具有不利的、昂贵的影响。该传感器将大约是一罐苏打水的大小，并在几秒钟内提供个位数的十亿分之一（ppb）的灵敏度，在一分钟内提供0.25 ppb。批量生产的估计价格点将比目前的微量水分传感器低四到五倍。完全开发的坚固耐用的原型将适用于检测各种有毒，腐蚀性或惰性工艺气体中的水分。大幅提高的价格点将使半导体制造商能够在整个制造设施的每个工艺工具上部署传感器。如果成功，该项目将降低制造微电子半导体芯片的成本。基本技术应扩展到其他痕量气体检测应用，包括生物医学呼吸诊断。其他应用在检测对健康，职业安全和全球变暖重要的痕量环境物种中比比皆是。所提出的传感器的性能和价格点将使广泛分布到各个发现领域的科学研究人员。