MRI: Acquisition of Major Research Instrumentation for Fabrication and Characterization of Micro and Nanostructures for Sensing

这项主要的研究仪器(MRI)计划是为了购买一台具有电子束光刻和EDX能力的扫描电子显微镜(SEM)。该仪器将为南达科他州立大学的微纳电子实验室(MiNEL)增加最先进的光刻、成像和分析能力。与智力优势有关，该设备将支持几个正在进行的和拟议的纳米传感器研发领域的跨学科研究项目，以及校园内其他系的其他研究项目，包括化学、生物和乳品科学。这些项目包括开发用于监测空气质量和DNA分析的新的传感结构；改进加工奶酪的质地和功能；制定纳米结构光伏设备的研究方案；识别南极冰芯中的火山灰颗粒；以及通过动脉病毒编码的蛋白质组装类似病毒的颗粒。拟议活动的更广泛影响包括使用这一工具通过增加工程、化学、药学、生物学和乳品科学等几个学科的教学实验室模块来加强研究和教育基础设施。美洲原住民是一个代表性较低的群体，他们将受益于一个项目，该项目将一个SEM研讨会纳入一个现有的推广计划，重点是一所主要的地区性美国原住民高中。经济发展将通过与当地产业的联合项目来支持。在地方和州经济发展会议上展示研究成果将有助于证明研究与改善国土安全和健康等社会效益之间的联系。更广泛的受众，如K-12学生，将通过一个网站以扫描电子显微镜拍摄的图像为特色。该仪器还将加强最近成立的一个国家跨学科纳米技术研究中心和一个地区性纳米技术倡议。

This major research instrumentation (MRI) proposal is for the acquisition of a scanning electron microscope (SEM) with e-beam lithography and EDX capabilities. This instrument will add state-of-the-art lithography, imaging and analysis capabilities to the Micro and Nano-Electronics Laboratory (MiNEL) at South Dakota State University. Related to intellectual merit, this equipment will support several ongoing and proposed interdisciplinary research projects in nano-sensor research and development, as well as other research projects from other departments on campus including chemistry, biology and dairy science. These projects include the development of a new sensing structures for monitoring air quality and analysis of DNA; improvement of the texture and functionality of process cheese; the development of a research program in nano structured photovoltaic devices; The Identification of Volcanic Ash Particles in Antarctica Ice Cores; and the assembly of virus-like particles by arterivirus-encoded proteins. Broader Impacts of the Proposed Activity include using this instrument to enhance research and education infrastructure by adding instructional laboratory modules in several disciplines including engineering, chemistry, pharmacy, biology and dairy science. Native Americans, an underrepresented group, will benefit by a project to incorporate an SEM workshop into an existing outreach program focused on a major regional Native American high school. Economic development will be supported by joint projects with local industry. Presenting research results at local and state economic development meetings will help demonstrate the connection between research and societal benefit such as improved homeland security and health. Broader audiences such as K-12 students will be reached by a web site featuring images taken by the SEM. This instrumentation will also strengthen a recently established state interdisciplinary nanotechnology research center and a regional nanotechnology initiative.