MRI: Acquisition of NIL (Nanoimprint Lithography) System

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This proposal targets a micro- and nanoscale replication process, which is the subject of next generation nanomanufacturing. Although many research works focus on the fabrication of limited number of nano structures and devices, for true adaptation of the techniques in the engineering field, a reliable replication process must be sought after. Using the proposed equipment, multidisciplinary themes in the areas of MEMS fabrication, nanooptics, bio-inspired self-assembly and nano-microsensor will be pursued. Education and training is an essential part of the proposal. Two graduate courses, one undergrad course and one community college course will be leveraged by this system. On an average, twenty graduate students and forty undergraduate students will have hands-on experience in nanofabrication using this equipment every year. Educational outreach for K-12 students and teachers has been planned. Workshops for external users will be held regularly to train workforces in the Central Florida area. An online reservation system and user group community will be set up to overcome geographical limitations and to facilitate the external user's access.