MRI: Acquisition of NIL (Nanoimprint Lithography) System

MRI：获得 NIL（纳米压印光刻）系统

• 批准号: 0521497
• 负责人: Hyoung Jin Cho
• 金额: $ 20万
• 依托单位: The University of Central Florida Board of Trustees
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-08-01 至 2007-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0521497&HistoricalAwards=false
• 关键词: MRI; Acquisition; NIL; Nanoimprint; Lithography

This proposal targets a micro- and nanoscale replication process, which is the subject of next generation nanomanufacturing. Although many research works focus on the fabrication of limited number of nano structures and devices, for true adaptation of the techniques in the engineering field, a reliable replication process must be sought after. Using the proposed equipment, multidisciplinary themes in the areas of MEMS fabrication, nanooptics, bio-inspired self-assembly and nano-microsensor will be pursued. Education and training is an essential part of the proposal. Two graduate courses, one undergrad course and one community college course will be leveraged by this system. On an average, twenty graduate students and forty undergraduate students will have hands-on experience in nanofabrication using this equipment every year. Educational outreach for K-12 students and teachers has been planned. Workshops for external users will be held regularly to train workforces in the Central Florida area. An online reservation system and user group community will be set up to overcome geographical limitations and to facilitate the external user's access.

这项提案的目标是微米和纳米级的复制过程，这是下一代纳米制造的主题。虽然许多研究工作集中在有限数量的纳米结构和器件的制造上，但为了使工程领域的技术真正适应，必须寻求可靠的复制过程。使用拟议的设备，在MEMS制造，纳米光学，生物启发的自组装和纳米微传感器领域的多学科主题将被追求。教育和培训是该提案的重要组成部分。该系统将利用两门研究生课程、一门本科课程和一门社区学院课程。平均而言，每年有20名研究生和40名本科生将使用这种设备在纳米纤维方面获得实践经验。已计划对K-12学生和教师进行教育推广。将定期为外部用户举办讲习班，培训佛罗里达中部地区的劳动力。将建立一个在线预订系统和用户群社区，以克服地理限制，并便利外部用户的访问。