Phononic Crystals: A New Device Paradigm for Integrated Surface Acoustic Wave (SAW) Filters for Wireless Systems

声子晶体：无线系统集成声表面波滤波器的新器件范例本研究的目标是为GHz频率范围内最先进的无线系统开发使用声子晶体（pc）的紧凑型声表面波滤波器。本研究开发的PC结构将在半导体衬底上制造，以促进密集集成。为了实现这一目标，我们提出了pc的理论和实验相结合的努力，包括以下高水平的研究任务：1)开发了快速高效的三维分析工具，以仔细研究PC结构的基本特性；2)开发了一种系统的方法，用于PC波导和腔的色散工程，并结合这些设备来设计和优化SAW滤波器；3)开发了一种用于GHz频率范围内工作的PC结构的最佳工艺。4)开发用于PC SAW滤波器实验测量的精确表征工具。在本研究的三年期间内，我们将优化、制造和演示这种滤波器的基本构建模块，即演示具有声子带隙、最佳PC波导和最佳PC腔的PC。我们还将研究如何优化PC波导与腔体之间的耦合，以形成简单的声表面波滤波器。更广泛的影响：本提案中定义的PC结构有望在无线系统的片上滤波中创造一场革命。除了传统的滤波之外，该技术还可以为新型滤波器铺平道路，例如单芯片信道转换器，在非常小的设备占地面积内，不同的频段被路由到不同的输出滤波器。一旦了解了基本原理，我们就有希望为软件定义的无线电创建自适应滤波器。将培养两名研究生和几名本科生，以及一名优秀的高中生。为K-12和少数民族学生和高中教师提供学习无线声表面波设备的一些基础知识的机会，以及改进现有的有教师参与的研究生水平课程“声学设备和材料”是该提案的其他方面。

Phononic Crystals: A New Device Paradigm for Integrated SAW Filters for Wireless SystemsThe target of this research is to develop compact SAW filters using phononic crystals (PCs) for the state-of-the-art wireless systems in the GHz frequency regime. The PC structures developed in this research will be fabricated on semiconducting substrates to facilitate dense integration. To achieve this goal, we propose a combined theoretical and experimental effort in PCs including the following high-level research tasks: 1) The development of fast and efficient three-dimensional analysis tools to carefully investigate the fundamental properties of PC structures, 2) The development of a systematic method for dispersion engineering in PC waveguides and cavities and combining these devices to design and optimize SAW filters, 3) The development of an optimum procedure for fabricating PC structures for operation in GHz frequency range, 4) The development of accurate characterization tools for experimental measurement of PC SAW filters. Within the three year period of this research, we will optimize, fabricate, and demonstrate the fundamental building blocks for such filters, i.e., demonstrate PCs with phononic bandgap, optimal PC waveguides, and optimal PC cavities. We will also investigate the optimization of coupling between PC waveguides and cavities to form simple SAW filters. Broader Impact: PC structures as defined in this proposal have the prospect of creating a revolution in on-chip filtering for wireless systems. In addition to traditional filtering, the technology could pave the way towards new types of filters such as a single-chip channelizer whereby different frequency bands are routed to different output filters within a very small device footprint. Once the fundamentals are understood, we have the prospect of creating adaptive filters for software-defined radio. Two graduate and several undergraduate students as well as an outstanding high school students will be trained. Providing K-12 and minority students and high school teachers with the opportunity of learning some basics of wireless SAW devices as well as improvement of an existing graduate level course on "Acoustic Devices and Materials" involving teachers are other aspects of this proposal.