SGER: Nano-Heater Systems for Thermal Nanomanufacturing

SGER：用于热纳米制造的纳米加热器系统

• 批准号: 0531127
• 负责人: Julie Chen
• 金额: --
• 依托单位: University of Massachusetts Lowell
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0531127&HistoricalAwards=false
• 关键词: SGER; Nano; Heater; Systems; Thermal

This project introduces a novel nano-heater source/valve concept, based on the exothermic material transformation of thin Ni and Al film pairs, deposited on the processed substrate. These are lithographically patterned into nanoscale islands in addressable arrays or custom layout systems, for in-situ, one-time localized rapid heating. Ignition and control of each nano-heater element is individually effected through thin dielectric and nano-channelled porous interlayers sandwiched between the Ni-Al films, by regulating the electrokinetic flow of reactants via interconnected electrical activation. This project will explore preliminary feasibility and utility of such nanoheater systems, by fabrication, testing, model-based thermal identification, design and control, to achieve specified dynamic thermal processing distributions at the nanoscale. If successful, the nanoheaters will be suitable for multiple thermal nanomanufacturing processes, especially in nanotemplated tools for massive processing of polymer substrates and nanofiber membranes, and autonomous power applications. On the other hand, they would be valuable as on-board power sources for autonomous operation of numerous nano/micro-electromechanical systems (N/MEMS), nanomotors, biomedical devices etc. Broader impacts of nano-heater research emanate from its integration with education and training activities, to be pursued via curricular materials and functional rapid prototypes, illustrating the scaling laws of thermal processing. In addition, they stem from the technical benefits of the technology, including its manufacturing simplicity, affordability, scalability, flexibility, energy efficiency and environmental sustainability.

本项目介绍了一种新颖的纳米加热源/阀的概念，该概念基于沉积在加工衬底上的薄Ni和Al薄膜对的放热材料转变。它们被光刻成可寻址阵列或定制布局系统中的纳米级岛屿，用于原位、一次性局部快速加热。每个纳米加热器元件的点火和控制是通过夹在Ni-Al薄膜之间的薄介电层和纳米沟道多孔层来单独实现的，通过相互连接的电激活来调节反应物的电动流动。该项目将探索这种纳米加热器系统的初步可行性和实用性，通过制造、测试、基于模型的热识别、设计和控制，以实现特定的纳米级动态热处理分布。如果成功，纳米加热器将适用于多种热纳米制造工艺，特别是用于大规模加工聚合物基材和纳米纤维膜的纳米模板化工具，以及自主电力应用。另一方面，它们将是许多纳米/微电子机械系统(N/MEMS)、纳米电机、生物医学设备等自主操作的车载电源。纳米加热器研究的更广泛影响源于其与教育和培训活动的整合，将通过课程材料和功能快速原型来追求，说明热加工的尺度规律。此外，它们源于该技术的技术优势，包括其制造简单性、可负担性、可扩展性、灵活性、能效和环境可持续性。