SGER: Nano-Heater Systems for Thermal Nanomanufacturing

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This project introduces a novel nano-heater source/valve concept, based on the exothermic material transformation of thin Ni and Al film pairs, deposited on the processed substrate. These are lithographically patterned into nanoscale islands in addressable arrays or custom layout systems, for in-situ, one-time localized rapid heating. Ignition and control of each nano-heater element is individually effected through thin dielectric and nano-channelled porous interlayers sandwiched between the Ni-Al films, by regulating the electrokinetic flow of reactants via interconnected electrical activation. This project will explore preliminary feasibility and utility of such nanoheater systems, by fabrication, testing, model-based thermal identification, design and control, to achieve specified dynamic thermal processing distributions at the nanoscale. If successful, the nanoheaters will be suitable for multiple thermal nanomanufacturing processes, especially in nanotemplated tools for massive processing of polymer substrates and nanofiber membranes, and autonomous power applications. On the other hand, they would be valuable as on-board power sources for autonomous operation of numerous nano/micro-electromechanical systems (N/MEMS), nanomotors, biomedical devices etc. Broader impacts of nano-heater research emanate from its integration with education and training activities, to be pursued via curricular materials and functional rapid prototypes, illustrating the scaling laws of thermal processing. In addition, they stem from the technical benefits of the technology, including its manufacturing simplicity, affordability, scalability, flexibility, energy efficiency and environmental sustainability.