MRI: Acquisition of an Optical Profiler for Surface Characterization and Dynamic Analysis of MEMS Devices

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The objective of this research is to investigate the mechanical properties and surface characteristics of thin-film microstructure devices. NSF funding is requested for the acquisition of an Optical Profiler for surface characterization and dynamic analysis of MEMS devices. The approach is to enhance the research activity and education initiatives at RIT in MEMS and Microsystems with the measurement capabilities of the Optical Profiler system. Intellectual MeritResearch areas that will be supported focus on the analysis of material properties and devices (i.e. coatings, diaphragms, actuators) at the micro-and nano-scale. The Optical Profiler system provides an alternative to SEM, AFM, and mechanical stylus profilometry, all which are destructive, and is uniquely suited for the metrology needs in the defined project areas. Unperturbed measurements of surface topology and vertical and lateral displacements with increased precision are enabled through the ability to measure these properties without physical contact. The DMEMS option allows the dynamic operation of MEMS devices (i.e. deflection, deformation, vibration modes, rotation) to be studied and quantified at frequencies up to 1MHz; ample for most MEMS device applications.Broader ImpactsA variety of undergraduate and graduate students majoring in science, technology, engineering, and other disciplines will use this instrument for research and discovery. Research Experience for Undergraduates (REU) proposals will be submitted in connection with a number of NSF supported projects that will utilize the Optical Profiler; these proposals will specifically target underrepresented groups and women. Measurement video presentation is ideal for K-12 outreach activities encouraging the exploration of technical careers.