MRI: Acquisition of an Optical Profiler for Surface Characterization and Dynamic Analysis of MEMS Devices

MRI：获取光学轮廓仪，用于 MEMS 器件的表面表征和动态分析

• 批准号: 0619676
• 负责人: Karl Hirschman
• 金额: $ 22.37万
• 依托单位: Rochester Institute of Tech
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-09-01 至 2009-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0619676&HistoricalAwards=false
• 关键词: MRI; Acquisition; Optical; Profiler; Surface

The objective of this research is to investigate the mechanical properties and surface characteristics of thin-film microstructure devices. NSF funding is requested for the acquisition of an Optical Profiler for surface characterization and dynamic analysis of MEMS devices. The approach is to enhance the research activity and education initiatives at RIT in MEMS and Microsystems with the measurement capabilities of the Optical Profiler system. Intellectual MeritResearch areas that will be supported focus on the analysis of material properties and devices (i.e. coatings, diaphragms, actuators) at the micro-and nano-scale. The Optical Profiler system provides an alternative to SEM, AFM, and mechanical stylus profilometry, all which are destructive, and is uniquely suited for the metrology needs in the defined project areas. Unperturbed measurements of surface topology and vertical and lateral displacements with increased precision are enabled through the ability to measure these properties without physical contact. The DMEMS option allows the dynamic operation of MEMS devices (i.e. deflection, deformation, vibration modes, rotation) to be studied and quantified at frequencies up to 1MHz; ample for most MEMS device applications.Broader ImpactsA variety of undergraduate and graduate students majoring in science, technology, engineering, and other disciplines will use this instrument for research and discovery. Research Experience for Undergraduates (REU) proposals will be submitted in connection with a number of NSF supported projects that will utilize the Optical Profiler; these proposals will specifically target underrepresented groups and women. Measurement video presentation is ideal for K-12 outreach activities encouraging the exploration of technical careers.

本研究的目的是研究薄膜微结构器件的力学性能和表面特性。申请美国国家科学基金会资助购买用于MEMS器件表面表征和动态分析的光学剖面仪。该方法是通过光学剖面仪系统的测量能力来增强RIT在MEMS和微系统方面的研究活动和教育计划。将支持的研究领域集中在微观和纳米尺度上的材料特性和器件（即涂层，隔膜，执行器）的分析。光学剖面仪系统提供了一种替代SEM， AFM和机械触控笔剖面测量的方法，所有这些都是破坏性的，并且非常适合定义项目区域的计量需求。通过在没有物理接触的情况下测量这些特性，可以提高表面拓扑结构和垂直和横向位移的精度。DMEMS选项允许在高达1MHz的频率下研究和量化MEMS器件的动态操作（即偏转，变形，振动模式，旋转）；适用于大多数MEMS器件应用。更广泛的影响各种主修科学、技术、工程和其他学科的本科生和研究生将使用该仪器进行研究和发现。本科生研究经验（REU）提案将与一些NSF支持的项目一起提交，这些项目将使用光学剖面仪；这些建议将专门针对代表性不足的群体和妇女。测量视频演示是理想的K-12推广活动，鼓励技术事业的探索。