SBIR Phase I: Picotesla Magnetic Sensor using MgO-Based Magnetic Tunnel Junction Technology

这个小型企业创新研究第一阶段项目将探索使用MgO基磁性隧道结（MTJ）阵列开发具有皮特斯拉分辨率的超低噪声磁场传感技术的可行性。这些传感器阵列将被设计成全有源惠斯通电桥配置，以检测超小磁场。基于MgO的MTJ传感器的上级灵敏度超过现有薄膜磁传感器技术的性能一个数量级，从而实现所承诺的性能。如果成功，这项研究将以低成本提供超灵敏的便携式磁传感器。使用MgO基MTJ制造大规模生产的微微特斯拉灵敏度磁传感器将对现有市场（如汽车和工业部门）以及新兴市场（如专注于脑磁图（MEG），心磁图（MCG），和生物磁性检测病毒和细菌。磁传感元件的灵敏度提高和成本降低将推动这些应用的能力。

This Small Business Innovation Research Phase I project will explore the feasibility of developing an ultra-low noise magnetic field sensing technique with picotesla resolution using arrays of MgO-based magnetic tunnel junctions (MTJs). These sensor arrays will be patterned into a fully-active Wheatstone bridge configuration to detect ultra-small magnetic fields. The superior sensitivity of MgO-based MTJ sensors exceeds the performance of existing thin film magnetic sensor technologies by an order of magnitude, allowing the promised performance. If successful, this research will deliver an ultra-sensitive, portable magnetic sensor at a low cost.The creation of mass-produced picotesla-sensitivity magnetic sensors using MgO-based MTJs will have a commercial impact both for existing markets requiring improved performance, such as the automotive and industrial sectors, and for emerging markets, such as those focused on magnetoencephalography (MEG), magneto-cardiography (MCG), and bio-magnetic detection of viruses and bacteria. The increased sensitivity and decreased cost of magnetic sensing components will push the capabilities of these applications.