SBIR Phase I: Miniaturized 10 MHz-500 MHz Single-Chip Multi-Frequency MEMS Filters for Electronic Communication

SBIR 第一阶段：用于电子通信的小型化 10 MHz-500 MHz 单芯片多频 MEMS 滤波器

• 批准号: 0712578
• 负责人: Justin Black
• 金额: --
• 依托单位: Harmonic Devices Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-07-01 至 2008-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0712578&HistoricalAwards=false
• 关键词: SBIR; Phase; Miniaturized; 10; MHz

This Small Business Innovation Research (SBIR) Phase I research aims to investigate the feasibility of producing miniaturized, multi-frequency, single-chip filters from 10 MHz to 500 MHz using aluminum nitride (AlN) micromachined-electromechanical-system (MEMS) piezoelectric resonators. The resonators for this work have their fundamental frequency set by lithographically defined features. This enables the design of arrays of multi-frequency filters directly at the Computer-Aided Design (CAD) layout level, without the need for any extra etching or deposition steps. Lithographic frequency definition also desensitizes this resonator to variations in film uniformity, which promises significant yield and cost advantages. In comparison to legacy Surface Acoustic Wave (SAW) and dielectric filters, these filters exhibit higher performance and are processed on silicon substrates, which will ultimately provide advantages in cost and form factor. It is anticipated the results of this research project will demonstrate the AlN contour filters can surpass the demanding specifications required of commercial IF filters.The IF filter solutions proposed here offer up to several orders of magnitude reduction in size and weight, enabling lower power consumption via reduced filter insertion loss, costing substantially less, and exhibiting equal or better performance than their surface acoustic wave (SAW) filter competitors. The addressable market for these IF filters and resonators includes the communications, aerospace / military, consumer electronics, automotive, and industrial sectors.

这项小型企业创新研究（SBIR）I阶段研究旨在研究使用氮化铝（ALN）微机械机械系统（MEMS）PIEZOELECTROC RESONECTROC RESONATORS。这项工作的谐振器的基本频率是由印度定义的特征设定的。这使得直接在计算机辅助设计（CAD）布局级别的多频过滤器的阵列设计，而无需任何额外的蚀刻或沉积步骤。光刻频率定义还使该谐振器对膜均匀性的变化不敏感，这有望具有显着的产量和成本优势。与传统的表面声波（SAW）和介电滤波器相比，这些过滤器表现出更高的性能，并在硅基板上进行处理，这最终将提供成本和外形的优势。可以预见，该研究项目的结果将证明ALN轮廓过滤器可以超过商业所需的苛刻规格。如果此处提出的过滤解决方案可提供多达数量的尺寸和重量的数量降低，从而可以通过降低过滤器插入损失，降低较低的插入损失，比表面较低的效果，并且表现出比相等的表面效果（表现出较低的性能）。如果过滤器和谐振器包括通信，航空航天 /军事，消费电子，汽车和工业部门，则这些市场的可寻址市场。