SBIR Phase I: MEMS-Based System for Particulate Matter Pollution Monitoring Using Thin-Film Bulk Acoustic Wave Resonators (FBARs)

SBIR 第一阶段：基于 MEMS 的颗粒物污染监测系统，使用薄膜体声波谐振器 (FBAR)

• 批准号: 0839783
• 负责人: Justin Black
• 金额: --
• 依托单位: Harmonic Devices Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0839783&HistoricalAwards=false
• 关键词: SBIR; Phase; MEMS; Based; System

This Small Business Innovation Research Phase I project will investigate the feasibility of a miniaturized, battery-powered, and inexpensive sensor to provide real-time mass measurements of airborne particulate matter (PM). PM is a major public health issue, and there is an urgent need for inexpensive devices that monitor PM in epidemiological studies of aerosol exposure, especially with regard to pollutants. The highly innovative PM mass monitor leverages state-of-the-art micromachined electromechanical system (MEMS) technologies to achieve unprecedented reductions in power consumption, cost, sample flow rate, and form factor. The system employs the thermophoretic deposition of particulates from a sample stream onto a thin-film bulk acoustic wave resonator (FBAR), and determines the mass deposited by measuring the frequency shift of an electronic oscillator. The Phase I effort will focus largely on improving the sensitivity and stability of the MEMS FBAR mass sensor, but also seek to reduce the monitor size and power consumption and to improve the interface electronics.The broader impact/commercial potential of this technology will be to inexpensively and quickly assess airborne particulates for human health and industrial cleanliness. Present instrumentation to measure PM mass can be bulky, costly to purchase, and difficult to operate. This real-time MEMS PM mass monitor provides a compelling value proposition by offering stand-alone operation and an order of magnitude reduction in size and power and lower cost in comparison to existing aerosol mass monitors. Markets for the instrument include industrial hygiene and clean room monitoring, power plant monitoring, mobile monitoring in aircraft, indoor air quality monitoring, ambient PM monitoring, and emergency response. The 2007 worldwide addressable market for the technology is over $100 million. This work contributes to scientific understanding by enabling a highly-sensitive, portable, and low-cost PM mass monitor for epidemiological studies of aerosol exposure. The technology has important societal impact by assisting those seeking to improve air quality and reduce the health impacts of airborne PM in the environment and workplace and by reducing the cost of collecting airborne PM pollution data.

这个小型企业创新研究阶段I项目将调查微型，电池供电且廉价的传感器的可行性，以提供对机载颗粒物（PM）的实时质量测量。 PM是一个主要的公共卫生问题，迫切需要廉价的设备在气雾剂暴露的流行病学研究中，尤其是在污染物方面。高度创新的PM质量监测器利用了最先进的微机械机电系统（MEMS）技术，以实现功率消耗，成本，样本流量和外形的前所未有的减少。该系统采用从样品流的颗粒物的嗜热沉积到薄膜大量的声波谐振器（FBAR）上，并通过测量电子振荡器的频移来确定沉积的质量。第一阶段的努力将主要集中在提高MEMS FBAR质量传感器的敏感性和稳定性上，但也试图降低监视器的尺寸和功耗并改善界面电子产品。该技术的更广泛的影响/商业潜力将在人类健康和工业清洁度中廉价，快速评估空中空间的颗粒物。目前测量PM质量的仪器可能是笨重的，购买的昂贵，并且难以操作。与现有的气溶胶质量监测器相比，这款实时MEMS PM质量监视器通过提供独立操作以及尺寸和功率降低的数量级来提供了令人信服的价值主张。该仪器的市场包括工业卫生和洁净室监控，发电厂监控，飞机上的移动监控，室内空气质量监控，环境PM监控和应急响应。 2007年全球可寻址的技术市场超过1亿美元。这项工作通过实现高度敏感，便携式和低成本PM质量监测量来有助于科学理解，以对气溶胶暴露的流行病学研究。该技术通过协助寻求提高空气质量并减少空降PM对环境和工作场所的健康影响的人们以及降低收集机载PM污染数据的成本来产生重要的社会影响。