SBIR Phase I: MEMS-Based System for Particulate Matter Pollution Monitoring Using Thin-Film Bulk Acoustic Wave Resonators (FBARs)

SBIR 第一阶段：基于 MEMS 的颗粒物污染监测系统，使用薄膜体声波谐振器 (FBAR)

• 批准号: 0839783
• 负责人: Justin Black
• 金额: --
• 依托单位: Harmonic Devices Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0839783&HistoricalAwards=false
• 关键词: SBIR; Phase; MEMS; Based; System

This Small Business Innovation Research Phase I project will investigate the feasibility of a miniaturized, battery-powered, and inexpensive sensor to provide real-time mass measurements of airborne particulate matter (PM). PM is a major public health issue, and there is an urgent need for inexpensive devices that monitor PM in epidemiological studies of aerosol exposure, especially with regard to pollutants. The highly innovative PM mass monitor leverages state-of-the-art micromachined electromechanical system (MEMS) technologies to achieve unprecedented reductions in power consumption, cost, sample flow rate, and form factor. The system employs the thermophoretic deposition of particulates from a sample stream onto a thin-film bulk acoustic wave resonator (FBAR), and determines the mass deposited by measuring the frequency shift of an electronic oscillator. The Phase I effort will focus largely on improving the sensitivity and stability of the MEMS FBAR mass sensor, but also seek to reduce the monitor size and power consumption and to improve the interface electronics.The broader impact/commercial potential of this technology will be to inexpensively and quickly assess airborne particulates for human health and industrial cleanliness. Present instrumentation to measure PM mass can be bulky, costly to purchase, and difficult to operate. This real-time MEMS PM mass monitor provides a compelling value proposition by offering stand-alone operation and an order of magnitude reduction in size and power and lower cost in comparison to existing aerosol mass monitors. Markets for the instrument include industrial hygiene and clean room monitoring, power plant monitoring, mobile monitoring in aircraft, indoor air quality monitoring, ambient PM monitoring, and emergency response. The 2007 worldwide addressable market for the technology is over $100 million. This work contributes to scientific understanding by enabling a highly-sensitive, portable, and low-cost PM mass monitor for epidemiological studies of aerosol exposure. The technology has important societal impact by assisting those seeking to improve air quality and reduce the health impacts of airborne PM in the environment and workplace and by reducing the cost of collecting airborne PM pollution data.

这个小企业创新研究第一阶段项目将研究一种小型化、电池供电、廉价的传感器的可行性，以提供空气中颗粒物（PM）的实时质量测量。颗粒物是一个重大的公共卫生问题，在气溶胶暴露的流行病学研究中，特别是在污染物方面，迫切需要廉价的监测颗粒物的设备。高度创新的PM质量监测器利用最先进的微机械机电系统（MEMS）技术，实现了前所未有的功耗、成本、样品流量和外形尺寸的降低。该系统将样品流中的颗粒热电泳沉积到薄膜体声波谐振器（FBAR）上，并通过测量电子振荡器的频移来确定沉积的质量。第一阶段的工作将主要集中在提高MEMS FBAR质量传感器的灵敏度和稳定性，同时也寻求减少显示器的尺寸和功耗，并改进接口电子器件。这项技术的更广泛的影响/商业潜力将是廉价和快速评估空气中的颗粒物对人类健康和工业清洁的影响。目前测量PM质量的仪器体积庞大，购买昂贵，操作困难。与现有的气溶胶质量监测器相比，这款实时MEMS PM质量监测器提供了一个引人注目的价值主张，它提供了独立操作，尺寸和功率减少了一个数量级，成本也更低。该仪器的市场包括工业卫生和洁净室监测、发电厂监测、飞机上的移动监测、室内空气质量监测、环境PM监测和应急响应。2007年，该技术的全球潜在市场超过1亿美元。这项工作通过为气溶胶暴露的流行病学研究提供高灵敏度、便携式和低成本的PM质量监测仪，有助于科学理解。该技术通过帮助那些寻求改善空气质量和减少环境和工作场所中空气中颗粒物对健康的影响的人，以及通过降低收集空气中颗粒物污染数据的成本，具有重要的社会影响。