MRI: Acquisition of an Inductively Coupled Plasma Etch System for Optoelectronic and Microelectronic Research and Training

ECCS-0722999D。Geddis，诺福克州立大学知识分子的优点这个请求国家科学基金会是一个电感耦合等离子体蚀刻系统，这将是一个主要的设备需要先进的干法蚀刻能力的玛丽五麦克德蒙德中心应用研究洁净室在诺福克州立大学。用于光刻、金属沉积和薄膜加工的补充设备已经购置，将安装在洁净室。电感耦合等离子蚀刻机将补充这一设备。 它将使III-V族器件的制造使用先进的干法蚀刻工艺。 这些设备将加强以下领域的研究和培训活动：用于生物化学剂监测/评估和空间环境测量的微传感器制造; 2.）用于目标识别的多/超光谱滤波和检测。 更广泛的影响为诺福克州立大学的玛丽.麦克德蒙德应用研究中心洁净室购买电感耦合等离子体蚀刻机的更大影响将是教育和培训新一代科学家和工程师，他们将取代学术界和与政府实验室或工业相关的研究和开发中心的退休教授和研究人员。 在21世纪的世纪，美国人口将比我们国家历史上的任何时期都更加具有文化多样性。 为了使国家在全球经济中保持技术竞争力，必须将妇女和代表性不足的少数民族的才能和技能纳入熟练和技术劳动力队伍。 主要研究人员认为，在诺福克州立大学建立一个最先进的洁净室将是国家科学基金会研究兴趣领域的核心。 此外，在微型加工技术课程中增加了一门研究生课程/研讨会，这将得益于购买拟议的蚀刻设备。

ECCS-0722999D. Geddis, Norfolk State UniversityIntellectual MeritThis request to the National Science Foundation is for an Inductively Coupled Plasma Etch System, which will be a major piece of equipment required for advanced dry etching capabilities for the Marie V. McDemmond Center for Applied Research Cleanroom at Norfolk State University. Complementary equipment for photolithography, metal deposition and thin film processing has already been purchased and will be installed in the cleanroom. An Inductively Coupled Plasma Etcher will complement this equipment. It will enable the fabrication of III-V devices using an advanced dry etch process. This equipment will enhance the research and training initiatives in the areas of 1.) microsensor fabrication for bio-chemical agent monitoring/assessment and space environment measurements and 2.) multi/-hyperspectral filtering and detection for target recognition. Broader ImpactThe larger impact of the acquisition of the Inductively Coupled Plasma Etcher for the Marie V. McDemmond Center for Applied Research Cleanroom at Norfolk State University will be the education and training of a new generation of scientists and engineers who will replace retiring professors and researchers in academia and research and development centers associated with the government laboratories or industry. During the 21st Century, the population of the United States will become more culturally diverse than in any period of our nation's history. In order for the nation to remain technically competitive in a global economy, the talents and skills of women and underrepresented minorities must be included in the skilled and technical workforce. The principal investigators believe that the establishment of a state of the art cleanroom at Norfolk State University will be central to areas of research interest of the National Science Foundation. Moreover, a graduate course/seminar has been added to the curriculum on microfabrication techniques that will benefit from the purchase of the proposed etching equipment.