MRI: Acquisition of an Inductively Coupled Plasma Etch System for Optoelectronic and Microelectronic Research and Training

MRI：采购用于光电和微电子研究和培训的感应耦合等离子体蚀刻系统

• 批准号: 0722999
• 负责人: Demetris Geddis
• 金额: $ 29.64万
• 依托单位: Norfolk State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-01 至 2010-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0722999&HistoricalAwards=false
• 关键词: MRI; Acquisition; Inductively; Coupled; Plasma

ECCS-0722999D. Geddis, Norfolk State UniversityIntellectual MeritThis request to the National Science Foundation is for an Inductively Coupled Plasma Etch System, which will be a major piece of equipment required for advanced dry etching capabilities for the Marie V. McDemmond Center for Applied Research Cleanroom at Norfolk State University. Complementary equipment for photolithography, metal deposition and thin film processing has already been purchased and will be installed in the cleanroom. An Inductively Coupled Plasma Etcher will complement this equipment. It will enable the fabrication of III-V devices using an advanced dry etch process. This equipment will enhance the research and training initiatives in the areas of 1.) microsensor fabrication for bio-chemical agent monitoring/assessment and space environment measurements and 2.) multi/-hyperspectral filtering and detection for target recognition. Broader ImpactThe larger impact of the acquisition of the Inductively Coupled Plasma Etcher for the Marie V. McDemmond Center for Applied Research Cleanroom at Norfolk State University will be the education and training of a new generation of scientists and engineers who will replace retiring professors and researchers in academia and research and development centers associated with the government laboratories or industry. During the 21st Century, the population of the United States will become more culturally diverse than in any period of our nation's history. In order for the nation to remain technically competitive in a global economy, the talents and skills of women and underrepresented minorities must be included in the skilled and technical workforce. The principal investigators believe that the establishment of a state of the art cleanroom at Norfolk State University will be central to areas of research interest of the National Science Foundation. Moreover, a graduate course/seminar has been added to the curriculum on microfabrication techniques that will benefit from the purchase of the proposed etching equipment.

eccs - 0722999 d吗。向美国国家科学基金会提出的这一申请是关于电感耦合等离子体蚀刻系统的，该系统将成为诺福克州立大学应用研究洁净室玛丽·v·麦克德蒙德中心先进干式蚀刻能力所需的主要设备。光刻、金属沉积和薄膜加工的配套设备已经购买，并将安装在洁净室。电感耦合等离子体蚀刻机将补充该设备。它将允许使用先进的干蚀刻工艺制造III-V器件。该设备将加强以下领域的研究和培训计划：1)用于生化剂监测/评估和空间环境测量的微传感器制造；2)用于目标识别的多/高光谱滤波和检测。更广泛的影响诺福克州立大学玛丽·v·麦克德蒙德应用研究中心洁净室电感耦合等离子蚀蚀机的收购的更大影响将是新一代科学家和工程师的教育和培训，他们将取代与政府实验室或工业相关的学术界和研发中心的退休教授和研究人员。在21世纪，美国人口的文化多样性将超过我国历史上任何时期。为了使国家在全球经济中保持技术竞争力，妇女和代表性不足的少数民族的才能和技能必须包括在熟练和技术劳动力中。主要研究人员认为，在诺福克州立大学建立一个最先进的无尘室将是国家科学基金会研究兴趣领域的核心。此外，已在课程中增加了一门关于微加工技术的研究生课程/研讨会，该课程将从购买拟议的蚀刻设备中受益。