SBIR Phase I: Multi-Dimensional Standing Wave Sensors for Measurement Across Dimensional Scales

SBIR 第一阶段：用于跨维度测量的多维驻波传感器

• 批准号: 0740209
• 负责人: Shane Woody
• 金额: --
• 依托单位: INSITUTEC, INC.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-01-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0740209&HistoricalAwards=false
• 关键词: SBIR; Phase; Multi; Dimensional; Standing

This SBIR Phase I research proposal addresses a disruptive tool with the inherent ability to measure, manipulate, and modify in three dimensions across multiple dimensional scales. The basic premise is focused upon an energy source capable of delivering, creating, and sustaining a multidimensional virtual tip high aspect ratio probe. The technology and approach enable the tip to be programmed into various geometric shapes while also providing the capability to detect surface interactions in a 3D space. In nano and micro-measurement this virtual tip when equipped on a measuring machine, provides the ability to perform high speed measuring through continuous scanning, is readily scaleable to nanoscale features, and enables reach into deep cavities and holesfor 3D measurement. The current scientific heritage in standing wave 1D sensors will be extended to investigate this innovative multi-dimensional sensor for high aspect ratio microscale feature measurements. Research areas include exploring linear driven mode with multi-dimensional capability, nonlinear dynamic modeling for setting up multi-harmonic standing wave modes, and investigating scaling issues for sub-micrometer feature measurements.Various recent reports have both identified microscale and nanoscale metrology tools as a bottleneck to innovation across multi-dimensional scales. Technology barriers continue to arise in three broad areas - measurement, modification, and manipulation. There are many industries now fabricating microscale features with inability to offer quality inspection tools. The market for instrumented tools operating at these scales is, and will be, disruptive thereby enabling scientific insight for emerging markets, predictive process capabilities, enhanced functionality, and connectivity across scales. This technology platform springboards into an array of applications ranging from semiconductor to MEMS.

这个SBIR第一阶段的研究建议解决了一个破坏性的工具，具有内在的能力，测量，操纵和修改在三维跨越多个维度的尺度。的基本前提是集中在一个能源能够提供，创建和维持一个多维虚拟尖端高纵横比探头。该技术和方法使尖端能够被编程为各种几何形状，同时还提供检测3D空间中的表面相互作用的能力。在纳米和微米测量中，当配备在测量机器上时，该虚拟尖端可通过连续扫描进行高速测量，易于扩展到纳米级特征，并可深入到深腔和孔中进行3D测量。驻波1D传感器的现有科学遗产将被扩展到研究这种创新的多维传感器，用于高纵横比的微尺度特征测量。研究领域包括探索具有多维能力的线性驱动模式，建立多谐波驻波模式的非线性动力学建模，以及研究亚微米特征测量的缩放问题。最近的各种报告都将微米和纳米尺度计量工具确定为多维尺度创新的瓶颈。技术壁垒继续出现在三个广泛的领域-测量，修改和操纵。现在有许多制造微尺度特征的行业无法提供质量检测工具。在这些规模上运行的仪表工具市场是，并将是，颠覆性的，从而实现对新兴市场的科学洞察，预测过程能力，增强功能和跨规模的连接。该技术平台可用于从半导体到MEMS的一系列应用。