Highthroughput Assembly of Nanowires, Nanotubes and Nanodevices on Silicon Platforms for Massively Parallel Nanoelectronics

用于大规模并行纳米电子学的硅平台上纳米线、纳米管和纳米器件的高通量组装

• 批准号: 0800680
• 负责人: Cengiz Ozkan
• 金额: $ 35.1万
• 依托单位: University of California-Riverside
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-07-01 至 2013-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0800680&HistoricalAwards=false
• 关键词: Highthroughput; Assembly; Nanowires; Nanotubes; Nanodevices

The semiconductor industry will soon be ramping for the 32nm node based on 193nm lithography. As the scaling of silicon-CMOS is approaching its physical limitations with the current patterning methods, alternative approaches for better lithographic resolution are required to keep a $260 billion market stable. Bio-inspired assembly of functional nanostructures and devices based on micro-array and nano-array platforms is one of the main objectives of this work. It has been a longstanding major challenge to efficiently integrate carbon nanotube or nanowire building blocks into functional systems. Only a large-scale integration technology will bring them the scientific and commercial importance of present day silicon technology. High-throughput assembly of nanoelectronics via a bottom-up approach using a top-down platform could become the method for integration on silicon. Bio-inspired assembly is a revolutionary approach to nanofabrication that could have major technological impact on computing, storage and display applications. The students trained on this project will be well positioned to pursue careers in academia and in the semiconductor, display and storage industries. UCR serves a fast-growing region of California that is highly diverse but lagging in educational and economic opportunity; this project is designed to attract more young people to studies and careers in science and technology. Through education and spin-off technology commercialization, this project can completely change the face of engineering education in our region.

半导体业界将在不久后推出以193nm光刻技术为基础的32nm节点。由于硅- cmos的缩放正在接近其现有模式方法的物理极限，因此需要更好的平版印刷分辨率的替代方法来保持2600亿美元的市场稳定。基于微阵列和纳米阵列平台的功能纳米结构和器件的仿生组装是本工作的主要目标之一。如何有效地将碳纳米管或纳米线构建块集成到功能系统中一直是一个长期存在的主要挑战。只有大规模集成技术才能给它们带来目前硅技术的科学和商业重要性。采用自底向上的方法和自顶向下的平台进行纳米电子器件的高通量组装可能成为硅上集成的方法。仿生装配是一种革命性的纳米制造方法，可能对计算、存储和显示应用产生重大的技术影响。在这个项目中训练的学生将很好地定位在学术界和半导体，显示和存储行业的职业生涯。UCR服务于加州一个快速发展的地区，该地区高度多样化，但在教育和经济机会方面落后；这个项目旨在吸引更多的年轻人在科技领域学习和就业。通过教育和衍生技术商业化，该项目可以彻底改变我们地区工程教育的面貌。