EAPSI: Physically Based Simulator Development for a Microlithography Process

EAPSI：微光刻工艺的基于物理的模拟器开发

• 批准号: 0813173
• 负责人: Thomas Palathra
• 金额: $ 0.51万
• 依托单位: Palathra Thomas C
• 依托单位国家: 美国
• 项目类别: Fellowship Award
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-06-01 至 2009-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0813173&HistoricalAwards=false
• 关键词: EAPSI; Physically; Based; Simulator; Development

2008 EAPSI FellowshipThis award supports a U.S. graduate student to conduct an individual research project at one of seven locations in East Asia and the Pacific region (Australia, China, Japan, Korea, New Zealand, Singapore, Taiwan). The research project will provide the student with a first-hand mentored research experience, an introduction to science and science policy infrastructure, and an orientation to the culture and language of the location. The primary goals of the East Asia Summer Institute program are to expose students to science and engineering in the context of a research laboratory, and to initiate early-career professional relationships that will foster research collaborations with foreign counterparts in the future.

2008年EAPSI奖学金该奖项支持美国研究生在东亚和太平洋地区的七个地点之一（澳大利亚，中国，日本，韩国，新西兰，新加坡，台湾）进行个人研究项目。 该研究项目将为学生提供第一手的指导研究经验，介绍科学和科学政策基础设施，以及对所在地文化和语言的定位。 东亚暑期研究所计划的主要目标是让学生在研究实验室的背景下接触科学和工程，并建立早期职业关系，以促进未来与外国同行的研究合作。