MRI: Acquisition of a Laser Lithography Tool

MRI：获得激光光刻工具

• 批准号: 0821852
• 负责人: Pallavi Dhagat
• 金额: $ 21万
• 依托单位: Oregon State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2009-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0821852&HistoricalAwards=false
• 关键词: MRI; Acquisition; Laser; Lithography; Tool

NSF Program: MRI PI: Pallavi DhagatMRI: Acquisition of a Laser Lithography ToolAbstract:The objective of this research is to develop low-cost electronics, sensors for medical diagnostics and environmental safety, and novel solid-state memory devices. The approach is to use direct write or maskless lithography techniques for rapid and inexpensive prototyping of device designs. Thus, the acquisition of a laser lithography tool capable of directly writing patterns on a photo-resist coated substrate is proposed. Presently, there is no equivalent tool at any of the Pacific Northwest universities.Intellectual Merit: The research spans diverse areas, including fabrication of transparent and printed electronic circuits, investigation of electrical properties of carbon nanotubes, and understanding of the physics of surface acoustic waves in magnetic thin films. The equipment proposed for acquisition is ideally suited to support research needs at a university - it provides economical, sub-micron lithography with ease of use and maintenance.Broader Impact: The tool will be designated as a shared resource, available to regional academic institutions and small businesses for research and education. It will facilitate a broad range of research activities in the microfabrication of electronic, fluidic and mechanical devices. Graduate and undergraduate students assisting in the cleanroom will gain experience in mask design, layout and fabrication. The equipment is also indispensable to the educational innovations, including micro-electromechanical systems (MEMS) fabrication, planned in the undergraduate microprocessing laboratories. The principal investigators will participate in the summer outreach programs coordinated by Oregon State University to expose high-school and under-represented minority students to microfabrication tools and techniques.

NSF计划：MRI PI：Pallavi DhagatMRI：收购激光光刻工具摘要：这项研究的目标是开发低成本电子产品、用于医疗诊断和环境安全的传感器以及新型固态存储设备。该方法是使用直接写入或无掩模光刻技术来快速且廉价地制作器件设计的原型。因此，提出了获得一种能够在光刻胶涂层衬底上直接写入图案的激光光刻工具。目前，太平洋西北大学还没有类似的工具。智力上的优点：这项研究横跨多个领域，包括制造透明和印刷电子电路，研究碳纳米管的电学性质，以及了解磁性薄膜中的表面声波物理。建议购买的设备非常适合支持大学的研究需求--它提供经济的亚微米光刻，易于使用和维护。广泛的影响：该工具将被指定为共享资源，供地区学术机构和小企业用于研究和教育。它将促进在电子、流体和机械设备的微制造方面的广泛研究活动。协助洁净室的研究生和本科生将获得面具设计、布局和制造方面的经验。该设备对计划在本科微处理实验室进行的教育创新也是不可或缺的，包括微电子机械系统(MEMS)的制造。主要调查人员将参加由俄勒冈州立大学协调的暑期推广计划，让高中生和代表性不足的少数族裔学生接触微细加工工具和技术。